Global Patent Index - EP 1032723 A1

EP 1032723 A1 2000-09-06 - METHOD AND APPARATUS FOR MISTED DEPOSITION OF THIN FILMS

Title (en)

METHOD AND APPARATUS FOR MISTED DEPOSITION OF THIN FILMS

Title (de)

VERFAHREN UND VORRICHTUNG ZUR ERZEUGUNG VON DÜNNSCHICHEN MITTELS NEBEL

Title (fr)

PROCEDE ET DISPOSITIF DE DEPOT EN BROUILLARD DE COUCHES MINCES

Publication

EP 1032723 A1 (EN)

Application

EP 98957677 A

Priority

  • US 9823753 W
  • US 97179997 A

Abstract (en)

[origin: WO9925895A1] A liquid mass flow controller (15) controls the delivery of a precursor to a mist generator (12), which produces a charged mist. The mist passes into a velocity reduction chamber (636), and then flows into a deposition chamber (632) through inlet ports (688) in a mist inlet plate (682) that is both a partition between the chambers and a grounded upper electrode. The inlet plate (682) is located above and substantially parallel to the plane of the substrate (600) on which the mist is to be deposited. The substrate (600) is positively charged to accelerate the mist. There are 68.2 inlet ports per cm<2> in an inlet port area (687) of 252 cm<2> of the mist inlet plate (682) directly above the substrate (600). The inlet port area (687) is approximately equal to a substrate deposition area (601). An exhaust port (642) defines a channel about periphery of an exhaust plane parallel to and below the substrate plane.

IPC 1-7 (main, further and additional classification)

C23C 16/44; C23C 16/40; H01L 21/314

IPC 8 full level (invention and additional information)

C23C 16/40 (2006.01); C23C 16/448 (2006.01); C23C 16/455 (2006.01); H01L 21/31 (2006.01); H01L 21/316 (2006.01); C23C 16/44 (2006.01); H01L 21/314 (2006.01)

CPC (invention and additional information)

C23C 16/45565 (2013.01); C23C 16/40 (2013.01); C23C 16/448 (2013.01); H01L 21/31691 (2013.01)

Citation (search report)

See references of WO 9925895A1

Designated contracting state (EPC)

BE DE FR GB IT NL

EPO simple patent family

WO 9925895 A1 19990527; EP 1032723 A1 20000906; JP 2001523889 A 20011127

INPADOC legal status


2003-03-26 [18D] DEEMED TO BE WITHDRAWN

- Effective date: 20020910

2002-04-10 [17Q] FIRST EXAMINATION REPORT

- Effective date: 20020226

2000-10-18 [RIN1] INVENTOR (CORRECTION)

- Inventor name: SOLAYAPPAN, NARAYAN

2000-10-18 [RIN1] INVENTOR (CORRECTION)

- Inventor name: MCMILLAN, LARRY, D.

2000-10-18 [RIN1] INVENTOR (CORRECTION)

- Inventor name: PAZ DE ARAUJO, CARLOS, A.

2000-09-06 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 20000615

2000-09-06 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A1

- Designated State(s): BE DE FR GB IT NL