EP 1032943 A2 20000906 - METHOD FOR PRODUCING PLASMA BY MICROWAVE IRRADIATION
Title (en)
METHOD FOR PRODUCING PLASMA BY MICROWAVE IRRADIATION
Title (de)
VERFAHREN ZUR ERZEUGUNG EINES PLASMAS DURCH EINSTRAHLUNG VON MIKROWELLEN
Title (fr)
PROCEDE DE PRODUCTION D'UN PLASMA PAR EXPOSITION A DES MICRO-ONDES
Publication
Application
Priority
- DE 9802727 W 19980915
- DE 19740792 A 19970917
Abstract (en)
[origin: DE19740792A1] The invention relates to a method for producing plasma by microwave irradiation, wherein a process gas is conducted into a container and a plasma is ignited by means of microwave irradiation. According to the invention, the injected microwave radiation is pulsed. This enables the same process result to be obtained at lower effective microwave output so that the process temperature can be scaled down. The process rate can also be increased at effectively the same injection output, thereby reducing process time and increasing charge quantities to a considerable degree.
IPC 1-7
IPC 8 full level
C23C 16/511 (2006.01); C23C 16/515 (2006.01); H01J 37/32 (2006.01); H01L 21/205 (2006.01); H05H 1/46 (2006.01)
CPC (source: EP US)
H01J 37/32192 (2013.01 - EP US); H01J 37/32266 (2013.01 - EP US); H01J 37/32706 (2013.01 - EP US)
Citation (search report)
See references of WO 9914787A2
Designated contracting state (EPC)
DE FR GB IT
DOCDB simple family (publication)
DE 19740792 A1 19990401; EP 1032943 A2 20000906; JP 2001516947 A 20011002; US 2003012890 A1 20030116; WO 9914787 A2 19990325; WO 9914787 A3 19990506
DOCDB simple family (application)
DE 19740792 A 19970917; DE 9802727 W 19980915; EP 98955327 A 19980915; JP 2000512232 A 19980915; US 50897100 A 20000811