Global Patent Index - EP 1032943 A2

EP 1032943 A2 2000-09-06 - METHOD FOR PRODUCING PLASMA BY MICROWAVE IRRADIATION

Title (en)

METHOD FOR PRODUCING PLASMA BY MICROWAVE IRRADIATION

Title (de)

VERFAHREN ZUR ERZEUGUNG EINES PLASMAS DURCH EINSTRAHLUNG VON MIKROWELLEN

Title (fr)

PROCEDE DE PRODUCTION D'UN PLASMA PAR EXPOSITION A DES MICRO-ONDES

Publication

EP 1032943 A2 (DE)

Application

EP 98955327 A

Priority

  • DE 9802727 W
  • DE 19740792 A

Abstract (en)

[origin: DE19740792A1] The invention relates to a method for producing plasma by microwave irradiation, wherein a process gas is conducted into a container and a plasma is ignited by means of microwave irradiation. According to the invention, the injected microwave radiation is pulsed. This enables the same process result to be obtained at lower effective microwave output so that the process temperature can be scaled down. The process rate can also be increased at effectively the same injection output, thereby reducing process time and increasing charge quantities to a considerable degree.

IPC 1-7 (main, further and additional classification)

H01J 37/32

IPC 8 full level (invention and additional information)

H05H 1/46 (2006.01); C23C 16/511 (2006.01); C23C 16/515 (2006.01); H01J 37/32 (2006.01); H01L 21/205 (2006.01)

CPC (invention and additional information)

H01J 37/32192 (2013.01); H01J 37/32266 (2013.01); H01J 37/32706 (2013.01)

Citation (search report)

See references of WO 9914787A3

Designated contracting state (EPC)

DE FR GB IT

EPO simple patent family

DE 19740792 A1 19990401; EP 1032943 A2 20000906; JP 2001516947 A 20011002; US 2003012890 A1 20030116; WO 9914787 A2 19990325; WO 9914787 A3 19990506

INPADOC legal status


2004-03-24 [18R] REFUSED

- Effective date: 20040115

2001-07-25 [17Q] FIRST EXAMINATION REPORT

- Effective date: 20010608

2000-09-06 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 20000417

2000-09-06 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A2

- Designated State(s): DE FR GB IT