Global Patent Index - EP 1032945 A1

EP 1032945 A1 2000-09-06 - METHOD AND APPARATUS FOR REDUCING THERMAL GRADIENTS WITHIN A CERAMIC WAFER SUPPORT PEDESTAL

Title (en)

METHOD AND APPARATUS FOR REDUCING THERMAL GRADIENTS WITHIN A CERAMIC WAFER SUPPORT PEDESTAL

Title (de)

VERFAHREN UND VORRICHTUNG ZUR VERMINDERUNG DER THERMISCHEN GRADIENTEN IN EINER KERAMISCHEN WAFERHALTEEINRICHTUNG

Title (fr)

PROCEDE ET DISPOSITIF PERMETTANT DE REDUIRE LES GRADIENTS DE TEMPERATURE DANS UN SOCLE DE SUPPORT DE TRANCHE EN CERAMIQUE

Publication

EP 1032945 A1 (EN)

Application

EP 98953443 A

Priority

  • US 9821581 W
  • US 96536997 A

Abstract (en)

[origin: WO9925005A1] A method and apparatus for reducing the thermal gradients within a ceramic wafer support pedestal. Specifically, the present invention is a heater controller that limits the amount of power that is applied to a resistive heater embedded within a ceramic pedestal. In a first embodiment of the invention limits the current that is delivered to the heater. In a second embodiment of the invention, the power applied to the heater coil is clamped to a maximum level.

IPC 1-7 (main, further and additional classification)

H01L 21/00

IPC 8 full level (invention and additional information)

H05B 3/00 (2006.01); H01L 21/00 (2006.01); H01L 21/683 (2006.01)

CPC (invention and additional information)

H01L 21/67103 (2013.01)

Citation (search report)

See references of WO 9925005A1

Designated contracting state (EPC)

BE DE FR GB NL

EPO simple patent family

WO 9925005 A1 19990520; EP 1032945 A1 20000906; JP 2001523041 A 20011120; KR 20010031823 A 20010416; TW 493215 B 20020701

INPADOC legal status


2004-07-07 [18D] APPLICATION DEEMED TO BE WITHDRAWN

- Effective date: 20040103

2003-09-17 [17Q] FIRST EXAMINATION REPORT

- Effective date: 20030730

2000-09-06 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 20000531

2000-09-06 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A1

- Designated State(s): BE DE FR GB NL