Global Patent Index - EP 1035582 A2

EP 1035582 A2 2000-09-13 - Semiconductor device and method of manufacturing the same

Title (en)

Semiconductor device and method of manufacturing the same

Title (de)

Halbleiterbauelement und zugehöriges Herstellungsverfahren

Title (fr)

Dispositif semi-conducteur et sa méthode de fabrication

Publication

EP 1035582 A2 (EN)

Application

EP 00104468 A

Priority

JP 6071799 A

Abstract (en)

A semiconductor device comprises at least element isolation regions 102 arranged on a main surface of a semiconductor substrate 100, one element region arranged on the main surface of the semiconductor substrate 100 to be surrounded by the element isolation insulating film 102, a gate electrode wiring 108b formed on the element isolation insulating film 102, and a gate electrode wiring108a formed over the element region via a gate insulating film 106. The coupling capacitance can be reduced by setting heights of the gate electrode wirings 108a and 108b substantially equally to thus reduce their opposing area. Also, the leakage current flowing between the gate electrode 108b and the semiconductor substrate 100 can be suppressed by forming the element isolation insulating film 102 to have a convex shape from the main surface of the semiconductor substrate 100. <IMAGE>

IPC 1-7 (main, further and additional classification)

H01L 23/522; H01L 21/762

IPC 8 full level (invention and additional information)

H01L 21/28 (2006.01); H01L 21/3205 (2006.01); H01L 21/762 (2006.01); H01L 21/8234 (2006.01); H01L 21/8242 (2006.01); H01L 23/52 (2006.01); H01L 27/088 (2006.01); H01L 27/108 (2006.01); H01L 29/78 (2006.01)

CPC (invention and additional information)

H01L 21/76224 (2013.01)

Designated contracting state (EPC)

AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

EPO simple patent family

EP 1035582 A2 20000913; CN 1266276 A 20000913; JP 2000260882 A 20000922; TW 441044 B 20010616

INPADOC legal status


2003-07-02 [18W] WITHDRAWN

- Ref Legal Event Code: 18W

- Effective date: 20030423

2000-09-13 [17P] REQUEST FOR EXAMINATION FILED

- Ref Legal Event Code: 17P

- Effective date: 20000308

2000-09-13 [AK] DESIGNATED CONTRACTING STATES:

- Ref Legal Event Code: AK

- Designated State(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

2000-09-13 [AX] REQUEST FOR EXTENSION OF THE EUROPEAN PATENT TO

- Ref Legal Event Code: AX

- Free Format Text: AL;LT;LV;MK;RO;SI