EP 1036342 A2 20000920 - ELEMENT COMPRISING A FILTERING STRUCTURE
Title (en)
ELEMENT COMPRISING A FILTERING STRUCTURE
Title (de)
EINE FILTERSTRUKTUR AUFWEISENDES BAUELEMENT
Title (fr)
ELEMENT PRESENTANT UNE STRUCTURE FILTRANTE
Publication
Application
Priority
- DE 9803068 W 19981020
- DE 19746089 A 19971020
Abstract (en)
[origin: DE19746089A1] One or more further laminations are formed to the first one in a substrate and are offset in depth with respect to the first lamination. The further lamination(s) carries out a different filter function than the first lamination at least one further lamination is exposed by etching, at least partly. The substrate material is typically of Si, Ge, Al, or Si-Ge. There may be further, typically single layers, between the laminations, and grooves or apertures with different optical properties, changed with respect to the other material.
IPC 1-7
IPC 8 full level
G02B 5/20 (2006.01); G02B 5/28 (2006.01); H01L 27/14 (2006.01); H01L 31/0216 (2006.01); H01L 31/10 (2006.01)
CPC (source: EP)
G02B 5/285 (2013.01); H01L 31/02165 (2013.01)
Citation (search report)
See references of WO 9921033A2
Designated contracting state (EPC)
DE FR GB IT NL
DOCDB simple family (publication)
DE 19746089 A1 19990429; EP 1036342 A2 20000920; JP 2001521177 A 20011106; WO 9921033 A2 19990429; WO 9921033 A3 19990610
DOCDB simple family (application)
DE 19746089 A 19971020; DE 9803068 W 19981020; EP 98961024 A 19981020; JP 2000517296 A 19981020