Global Patent Index - EP 1039977 A1

EP 1039977 A1 2000-10-04 - A METHOD FOR REMOVING SURFACE CONTAMINANTS ON MOULDS USED IN SEMICONDUCTOR PACKAGING TOOLS

Title (en)

A METHOD FOR REMOVING SURFACE CONTAMINANTS ON MOULDS USED IN SEMICONDUCTOR PACKAGING TOOLS

Title (de)

VERFAHREN ZUM ENTFERNEN VON OBERFLÄCHENVERUNREINIGUNGEN VON IN HALBLEITERVERPACKUNGSWERKZEUGEN VERWENDETEN FORMEN

Title (fr)

PROCEDE PERMETTANT D'ELIMINER LES CONTAMINANTS DE SURFACE DE MOULES UTILISES SUR DES OUTILS D'ENCAPSULATION DE SEMICONDUCTEURS

Publication

EP 1039977 A1 (EN)

Application

EP 98936795 A

Priority

  • SG 9800058 W
  • SG 1997004544 A

Abstract (en)

[origin: WO9930845A1] The present invention utilizes laser to remove the surface contaminants such as grease, wax, and resin residue from a mould used in semiconductor packaging tools. The contaminant removal process utilizing the laser involves shooting a beam of laser onto the surface of the mould having the contaminants. The laser is delivered as a pulse which lasts only a short duration. Multiple pulses may be required to completely remove the contaminants. Because the area of coverage for each pulse is usually much smaller than the total area of the mould surface, the laser needs to be moved around until the entire mould surface has been exposed to the laser. Because fumes are produced as the laser disintegrates the contaminants, some type of vacuum should be used to remove the residual gas and other debris.

IPC 1-7 (main, further and additional classification)

B08B 7/00; B29C 33/72

IPC 8 full level (invention and additional information)

B08B 7/00 (2006.01); B29C 33/72 (2006.01)

CPC (invention and additional information)

B08B 7/0042 (2013.01)

Designated contracting state (EPC)

DE GB NL

EPO simple patent family

WO 9930845 A1 19990624; CN 1210113 C 20050713; CN 1282277 A 20010131; EP 1039977 A1 20001004; EP 1039977 A4 20030813; JP 2002508249 A 20020319; MY 136708 A 20081128; SG 78282 A1 20010220; TW 480689 B 20020321

INPADOC legal status


2003-08-20 [18W] WITHDRAWN

- Effective date: 20030618

2003-08-13 [A4] SUPPLEMENTARY SEARCH REPORT

- Effective date: 20030630

2000-10-04 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 20000707

2000-10-04 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A1

- Designated State(s): DE GB NL