Global Patent Index - EP 1042526 A1

EP 1042526 A1 2000-10-11 - MAGNETRON SPUTTERING SOURCE

Title (en)

MAGNETRON SPUTTERING SOURCE

Title (de)

MAGNETRONSPUTTERQUELLE

Title (fr)

SOURCE DE PULVERISATION AU MAGNETRON

Publication

EP 1042526 A1 (DE)

Application

EP 98958140 A

Priority

  • CH 9800537 W
  • CH 289797 A

Abstract (en)

[origin: WO9931290A1] Disclosed is a magnetron sputtering source, comprising at least two long targets (3a, 3b, 3c) which are electrically insulated from each other and arranged next to each other in a longitudinal direction. The lateral spacing is substantially smaller than the corresponding spreading of the targets (3a, 3b, 3c). Each target has its own electrical connection (5a, 5b, 5c). Anodes (7a, 7b) are provided preferably between the targets (3a, 3b, 3c).

IPC 1-7 (main, further and additional classification)

C23C 14/35; H01J 37/34

IPC 8 full level (invention and additional information)

H05H 1/24 (2006.01); C23C 14/08 (2006.01); C23C 14/34 (2006.01); C23C 14/35 (2006.01); H01J 37/34 (2006.01); H01L 21/285 (2006.01)

CPC (invention and additional information)

H01J 37/3408 (2013.01); C23C 14/35 (2013.01); H01J 37/3452 (2013.01); H01J 2237/3325 (2013.01)

Citation (search report)

See references of WO 9931290A1

Designated contracting state (EPC)

AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

EPO simple patent family

WO 9931290 A1 19990624; CN 100529168 C 20090819; CN 1239737 C 20060201; CN 1282384 A 20010131; CN 1776006 A 20060524; CN 1896301 A 20070117; DE 19881914 D2 20010104; EP 1042526 A1 20001011; EP 2119810 A2 20091118; EP 2119810 A3 20101006; HK 1033344 A1 20060818; JP 2002508447 A 20020319; JP 2004091927 A 20040325; JP 3794919 B2 20060712; KR 100512523 B1 20050905; KR 100915497 B1 20090904; KR 20040053356 A 20040623; KR 20090009987 A 20090123; TW 420822 B 20010201; US 2002036133 A1 20020328; US 6093293 A 20000725; US 6284106 B1 20010904; US 6454920 B1 20020924

INPADOC legal status


2009-08-12 [18R] REFUSED

- Effective date: 20090423

2007-05-02 [RAP1] TRANSFER OF RIGHTS OF AN EP PUBLISHED APPLICATION

- Owner name: OERLIKON TRADING AG, TRUEBBACH

2004-03-24 [17Q] FIRST EXAMINATION REPORT

- Effective date: 20040204

2000-10-11 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 20000526

2000-10-11 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A1

- Designated State(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE