Global Patent Index - EP 1042792 A1

EP 1042792 A1 2000-10-11 - METHOD AND DEVICE FOR REMOVING A CUT-OUT FROM A LAYER OF MATERIAL

Title (en)

METHOD AND DEVICE FOR REMOVING A CUT-OUT FROM A LAYER OF MATERIAL

Title (de)

VERFAHREN UND EINRICHTUNG ZUM ABLÖSEN EINES AUSSCHNITTS EINER MATERIALSCHICHT

Title (fr)

PROCEDE ET DISPOSITIF POUR DETACHER UNE PARTIE DECOUPEE D'UNE COUCHE DE MATERIAU

Publication

EP 1042792 A1 (DE)

Application

EP 99971581 A

Priority

  • DE 19849658 A
  • EP 9908180 W

Abstract (en)

[origin: DE19849658A1] The invention relates to a method for removing a cut-out which is placed on a support (40) from a layer of material (30) which extends in a layer plane and has a particular layer thickness, by means of a laser pulse (16) which penetrates through the support (40). The aim of the invention is to provide a means of removing the cut-outs from a layer of material (30) with as little thermal stress and as few thermal side effects as possible. To this end, the laser pulse (16) produces burnt material in a partial layer volume (50) of the cut-out which is adjacent to the support and is located within a stretch of the beam cross section (Q) of the laser pulse (16) in the layer plane and extends crosswise to the layer plane over part of the layer thickness (D), said burnt material being in a thermodynamic state of non-equilibrium with a density resembling that of a solid and especially, a temperature above the critical temperature. A coherent, solid partial layer (60) remains in the cut-out on the side of the partial layer volume (50) facing the support (40). This is moved away from the support (40) by the burnt material.

IPC 1-7 (main, further and additional classification)

H01L 21/268; B23K 26/00; C23C 14/28; H01L 39/24

IPC 8 full level (invention and additional information)

B23K 26/18 (2006.01); H05K 3/04 (2006.01)

CPC (invention and additional information)

B23K 26/18 (2013.01); B23K 26/009 (2013.01); H05K 3/046 (2013.01); Y10T 156/1158 (2013.01)

Citation (search report)

See references of WO 0026951A1

Designated contracting state (EPC)

DE FR GB NL

EPO simple patent family

DE 19849658 A1 20000504; EP 1042792 A1 20001011; US 6521068 B1 20030218; WO 0026951 A1 20000511

INPADOC legal status


2008-07-30 [18D] DEEMED TO BE WITHDRAWN

- Effective date: 20080129

2007-06-06 [17Q] FIRST EXAMINATION REPORT

- Effective date: 20070508

2006-06-21 [RAP1] TRANSFER OF RIGHTS OF AN EP PUBLISHED APPLICATION

- Owner name: DEUTSCHES ZENTRUM FUER LUFT- UND RAUMFAHRT E.V.

2004-05-12 [RBV] DESIGNATED CONTRACTING STATES (CORRECTION):

- Designated State(s): DE FR GB NL

2000-10-11 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 20000627

2000-10-11 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A1

- Designated State(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE