Global Patent Index - EP 1042794 A1

EP 1042794 A1 2000-10-11 - PROCESS FOR PRODUCING A POROUS LAYER BY AN ELECTROCHEMICAL ETCHING PROCESS

Title (en)

PROCESS FOR PRODUCING A POROUS LAYER BY AN ELECTROCHEMICAL ETCHING PROCESS

Title (de)

VERFAHREN ZUR HERSTELLUNG EINER PORÖSEN SCHICHT MIT HILFE EINES ELEKTROCHEMISCHEN ÄTZPROZESSES

Title (fr)

PROCEDE DE PRODUCTION D'UNE COUCHE POREUSE PAR UN PROCESSUS DE GRAVURE ELECTROCHIMIQUE

Publication

EP 1042794 A1 (DE)

Application

EP 98966576 A

Priority

  • DE 9803775 W
  • DE 19757560 A

Abstract (en)

[origin: DE19757560A1] In a process for producing a porous layer by an electrochemical etching process, an etching mask which corresponds to the desired course of the deep-etching rate is used. For the course of the deep-etching rate to be continuous, a wedge-shaped etching mask can be selected.

IPC 1-7 (main, further and additional classification)

H01L 21/306; C25F 3/12; H01L 21/321; H01L 33/00

IPC 8 full level (invention and additional information)

G02B 1/11 (2006.01); C25F 3/12 (2006.01); H01L 21/306 (2006.01); H01L 21/3063 (2006.01); H01L 21/321 (2006.01); H01L 33/34 (2010.01); H01S 5/10 (2006.01)

CPC (invention and additional information)

H01L 33/346 (2013.01); C25F 3/12 (2013.01); H01L 21/306 (2013.01); H01L 21/321 (2013.01)

Citation (search report)

See references of WO 9934421A1

Designated contracting state (EPC)

CH DE FR GB IT LI NL

EPO simple patent family

DE 19757560 A1 19990701; CA 2315674 A1 19990708; EP 1042794 A1 20001011; JP 2002500275 A 20020108; US 6398943 B1 20020604; WO 9934421 A1 19990708

INPADOC legal status


2005-01-26 [18W] WITHDRAWN

- Effective date: 20041208

2002-07-10 [RAP1] TRANSFER OF RIGHTS OF AN EP PUBLISHED APPLICATION

- Owner name: FORSCHUNGSZENTRUM JUELICH GMBH

2000-10-11 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 20000620

2000-10-11 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A1

- Designated State(s): CH DE FR GB IT LI NL