EP 1042794 A1 20001011 - PROCESS FOR PRODUCING A POROUS LAYER BY AN ELECTROCHEMICAL ETCHING PROCESS
Title (en)
PROCESS FOR PRODUCING A POROUS LAYER BY AN ELECTROCHEMICAL ETCHING PROCESS
Title (de)
VERFAHREN ZUR HERSTELLUNG EINER PORÖSEN SCHICHT MIT HILFE EINES ELEKTROCHEMISCHEN ÄTZPROZESSES
Title (fr)
PROCEDE DE PRODUCTION D'UNE COUCHE POREUSE PAR UN PROCESSUS DE GRAVURE ELECTROCHIMIQUE
Publication
Application
Priority
- DE 9803775 W 19981222
- DE 19757560 A 19971223
Abstract (en)
[origin: DE19757560A1] In a process for producing a porous layer by an electrochemical etching process, an etching mask which corresponds to the desired course of the deep-etching rate is used. For the course of the deep-etching rate to be continuous, a wedge-shaped etching mask can be selected.
IPC 1-7
IPC 8 full level
G02B 1/11 (2006.01); C25F 3/12 (2006.01); H01L 21/306 (2006.01); H01L 21/3063 (2006.01); H01L 21/321 (2006.01); H01L 33/34 (2010.01); H01S 5/10 (2006.01)
CPC (source: EP US)
C25F 3/12 (2013.01 - EP US); H01L 21/306 (2013.01 - EP US); H01L 21/321 (2013.01 - EP US); H01L 33/346 (2013.01 - EP US)
Designated contracting state (EPC)
CH DE FR GB IT LI NL
DOCDB simple family (publication)
DE 19757560 A1 19990701; CA 2315674 A1 19990708; EP 1042794 A1 20001011; JP 2002500275 A 20020108; US 6398943 B1 20020604; WO 9934421 A1 19990708
DOCDB simple family (application)
DE 19757560 A 19971223; CA 2315674 A 19981222; DE 9803775 W 19981222; EP 98966576 A 19981222; JP 2000526960 A 19981222; US 58169200 A 20000614