Global patent index - EP 1048058 A1

EP 1048058 A1 2000-11-02 - DEVICE FOR CARRYING OUT WET TREATMENT OF SUBSTRATES

Title (en)

DEVICE FOR CARRYING OUT WET TREATMENT OF SUBSTRATES

Title (de)

VORRICHTUNG ZUR NASSBEHANDLUNG VON SUBSTRATEN

Title (fr)

DISPOSITIF DE TRAITEMENT PAR VOIE HUMIDE DE SUBSTRATS

Publication

EP 1048058 A1 (DE)

Application

EP 98963481 A

Priority

  • DE 19800951 A
  • EP 9807403 W

Abstract (en)

[origin: DE19800951A1] The container is provided with at least one holding element (10) which can be brought into engagement with the substrate carrier. The apparatus for wet treatment of substrates (2) in a treatment fluid (4) in a container, with the substrate together with its carrier (1) introduced into the container

IPC 1-7 (main, further and additional classification)

H01L 21/00

IPC 8 full level (invention and additional information)

H01L 21/306 (2006.01); H01L 21/00 (2006.01); H01L 21/304 (2006.01); H01L 21/687 (2006.01)

CPC (invention and additional information)

H01L 21/67057 (2013.01); H01L 21/687 (2013.01)

Citation (search report)

See references of WO 9936943A1

Designated contracting state (EPC)

BE DE FR GB IT NL

EPO simple patent family

DE 19800951 A1 19990715; EP 1048058 A1 20001102; JP 2002510140 A 20020402; WO 9936943 A1 19990722

INPADOC legal status

2002-02-27 [18W] WITHDRAWN

- Ref Legal Event Code: 18W

- Date of withdrawal: 20020104

2001-08-22 [17Q] FIRST EXAMINATION REPORT

- Ref Legal Event Code: 17Q

- Effective date: 20010711

2000-11-02 [17P] REQUEST FOR EXAMINATION FILED

- Ref Legal Event Code: 17P

- Effective date: 20000707

2000-11-02 [AK] DESIGNATED CONTRACTING STATES:

- Ref Legal Event Code: AK

- Designated State(s): BE DE FR GB IT NL