EP 1048058 A1 20001102 - DEVICE FOR CARRYING OUT WET TREATMENT OF SUBSTRATES
Title (en)
DEVICE FOR CARRYING OUT WET TREATMENT OF SUBSTRATES
Title (de)
VORRICHTUNG ZUR NASSBEHANDLUNG VON SUBSTRATEN
Title (fr)
DISPOSITIF DE TRAITEMENT PAR VOIE HUMIDE DE SUBSTRATS
Publication
Application
Priority
- DE 19800951 A 19980113
- EP 9807403 W 19981118
Abstract (en)
[origin: DE19800951A1] The container is provided with at least one holding element (10) which can be brought into engagement with the substrate carrier. The apparatus for wet treatment of substrates (2) in a treatment fluid (4) in a container, with the substrate together with its carrier (1) introduced into the container
IPC 1-7
IPC 8 full level
H01L 21/00 (2006.01); H01L 21/304 (2006.01); H01L 21/306 (2006.01); H01L 21/687 (2006.01)
CPC (source: EP KR)
H01L 21/00 (2013.01 - KR); H01L 21/67057 (2013.01 - EP); H01L 21/687 (2013.01 - EP)
Citation (search report)
See references of WO 9936943A1
Designated contracting state (EPC)
BE DE FR GB IT NL
DOCDB simple family (publication)
DE 19800951 A1 19990715; EP 1048058 A1 20001102; JP 2002510140 A 20020402; KR 20010034121 A 20010425; WO 9936943 A1 19990722
DOCDB simple family (application)
DE 19800951 A 19980113; EP 9807403 W 19981118; EP 98963481 A 19981118; JP 2000540562 A 19981118; KR 20007007734 A 20000713