Global patent index - EP 1048070 A1

EP 1048070 A1 2000-11-02 - SYSTEM FOR RECEIVING AND RETAINING A SUBSTRATE

Title (en)

SYSTEM FOR RECEIVING AND RETAINING A SUBSTRATE

Title (de)

ÜBERNAHME- UND HALTESYSTEM FÜR EIN SUBSTRAT

Title (fr)

DISPOSITIF DE RECEPTION ET DE POSITIONNEMENT D'UN SUBSTRAT

Publication

EP 1048070 A1 (DE)

Application

EP 99963247 A

Priority

  • DE 9903637 W
  • DE 19853092 A

Abstract (en)

[origin: WO0030172A2] The invention relates to system for receiving and retaining a substrate (17) in a light exposure device that is fitted with a handling system for the feeding of said substrate (17), an electrostatic chuck arrangement (1) for the retention of said substrate (17) during exposure to light, whereby said arrangement can be displaced in coordinates X, Y, and an exposure lens system from which corpuscular radiation is directed onto the surface of the substrate at a right angle, corresponding to coodinate Z. The inventive retention system is provided with at least one second electrostatic chuck arrangement (1) which, like the first chuck arrangement (1), is used to retain the substrate (17) during exposure to light and is provided with a bearing surface for said substrate, whereby the bearing surface of the second chuck arrangement (6) is, however, arranged in such a way that it can de displaced in the direction of coordinate Z. In terms of retention force, both chuck arrangements (1,6) are configured in such a way that the substrate (17) is maintained in a firm position when its placed on the first chuck arrangement (1) or solely on the second chuck arrangement (6).

IPC 1-7 (main, further and additional classification)

H01L 21/68

IPC 8 full level (invention and additional information)

G03F 7/20 (2006.01); H01L 21/027 (2006.01); H01L 21/683 (2006.01)

CPC (invention and additional information)

G03F 7/70691 (2013.01); H01L 21/6833 (2013.01)

Citation (search report)

See references of WO 0030172A3

Designated contracting state (EPC)

DE FR GB IT

EPO simple patent family

WO 0030172 A2 20000525; WO 0030172 A3 20001123; DE 19853092 A1 20000615; DE 19853092 B4 20041021; EP 1048070 A1 20001102; JP 2002530866 A 20020917; TW 430751 B 20010421; US 6480369 B1 20021112

INPADOC legal status

2008-09-10 [18D] DEEMED TO BE WITHDRAWN

- Ref Legal Event Code: 18D

- Effective date: 20080318

2004-05-19 [RBV] DESIGNATED CONTRACTING STATES (CORRECTION):

- Ref Legal Event Code: RBV

- Designated State(s): DE FR GB IT

2000-11-02 [17P] REQUEST FOR EXAMINATION FILED

- Ref Legal Event Code: 17P

- Effective date: 20000803

2000-11-02 [AK] DESIGNATED CONTRACTING STATES:

- Ref Legal Event Code: AK

- Designated State(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE