Global Patent Index - EP 1050069 A1

EP 1050069 A1 2000-11-08 - DEVICE AND METHOD FOR TREATING SUBSTRATES

Title (en)

DEVICE AND METHOD FOR TREATING SUBSTRATES

Title (de)

VORRICHTUNG UND VERFAHREN ZUR BEHANDLUNG VON SUBSTRATEN

Title (fr)

DISPOSITIF ET PROCEDE POUR LE TRAITEMENT DE SUBSTRATS

Publication

EP 1050069 A1 (DE)

Application

EP 98966678 A

Priority

  • DE 19802579 A
  • EP 9808469 W

Abstract (en)

[origin: DE19802579A1] A substrate treatment apparatus has a substrate raising and lowering device (20), the speed or stroke of which is variable in accordance with the substrate size. Independent claims are also included for the following: (i) a substrate treatment process in which substrates (32) are raised from and lowered into a treatment fluid (10) at a speed which varies according to their size; and (ii) a substrate treatment process in which substrates are lowered into a treatment fluid to different depths depending on their size.

IPC 1-7 (main, further and additional classification)

H01L 21/00

IPC 8 full level (invention and additional information)

H01L 21/677 (2006.01); B05D 1/18 (2006.01); H01L 21/00 (2006.01); H01L 21/304 (2006.01); H01L 21/306 (2006.01)

CPC (invention and additional information)

H01L 21/02052 (2013.01); B05D 1/18 (2013.01); H01L 21/67023 (2013.01)

Citation (search report)

See references of WO 9938198A1

Designated contracting state (EPC)

AT BE DE FR GB NL

EPO simple patent family

DE 19802579 A1 19990729; EP 1050069 A1 20001108; JP 2002502111 A 20020122; TW 447032 B 20010721; WO 9938198 A1 19990729

INPADOC legal status


2002-07-03 [18W] WITHDRAWN

- Date of withdrawal: 20020506

2000-11-08 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 20000707

2000-11-08 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A1

- Designated State(s): AT BE DE FR GB NL