EP 1051727 A1 20001115 - DISCHARGE LAMP SOURCES APPARATUS AND METHODS
Title (en)
DISCHARGE LAMP SOURCES APPARATUS AND METHODS
Title (de)
QUELLEN FÜR ENLADUNGSLAMPEN UND VERFAHREN
Title (fr)
SOURCES POUR LAMPE A DECHARGE ET PROCEDES CORRESPONDANTS
Publication
Application
Priority
- US 9827522 W 19981228
- US 169697 A 19971231
Abstract (en)
[origin: WO9934395A1] A capillary discharge extreme ultraviolet lamp source apparatus and method for extreme ultraviolet microlithography. The capillary source includes a lamp body (306); a bore having electrodes (300), insulators (302) and a discharge plasma region (304).
IPC 1-7
IPC 8 full level
H01J 35/20 (2006.01); G01J 3/10 (2006.01); G03F 7/20 (2006.01); H01J 61/12 (2006.01); H01J 61/28 (2006.01); H01J 61/30 (2006.01); H05G 2/00 (2006.01)
CPC (source: EP US)
B82Y 10/00 (2013.01 - EP US); G01J 3/10 (2013.01 - EP US); G03F 7/70016 (2013.01 - EP US); G03F 7/70033 (2013.01 - EP US); G03F 7/70916 (2013.01 - EP US); G03F 7/70983 (2013.01 - EP US); H01J 61/12 (2013.01 - EP US); H01J 61/28 (2013.01 - EP US); H01J 61/30 (2013.01 - EP US); H05G 2/003 (2013.01 - EP US); H05G 2/005 (2024.08 - EP US)
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
DOCDB simple family (publication)
WO 9934395 A1 19990708; AU 1946599 A 19990719; CA 2315740 A1 19990708; CA 2315740 C 20040720; CN 1134043 C 20040107; CN 1306673 A 20010801; EP 1051727 A1 20001115; EP 1051727 A4 20041110; JP 2003518316 A 20030603; US 6031241 A 20000229; US 6188076 B1 20010213
DOCDB simple family (application)
US 9827522 W 19981228; AU 1946599 A 19981228; CA 2315740 A 19981228; CN 98813826 A 19981228; EP 98964297 A 19981228; JP 2000526942 A 19981228; US 169697 A 19971231; US 46681899 A 19991217