EP 1051735 A2 20001115 - CHARGED PARTICLE ENERGY ANALYSERS
Title (en)
CHARGED PARTICLE ENERGY ANALYSERS
Title (de)
ENERGIEANALYSATOREN FÜR GELADENE TEILCHEN
Title (fr)
ANALYSEURS D'ENERGIE DE PARTICULES CHARGEES
Publication
Application
Priority
- GB 9900009 W 19990112
- GB 9800488 A 19980112
Abstract (en)
[origin: WO9935668A2] An electron energy analyser has an electron column (10) to excite a sample (11) on a sample holder (12). Excitation of the sample (11) causes electrons to be emitted, and some of the electrons enter the analyser through an aperture (13), where they are subjected to a substantially hyperbolic field defined with reference to an x-axis and a y-axis, each of which axes is at a substantially constant potential, and which is approximated with a small number of electrodes E1 to E6. The electrons are deflected by the substantially hyperbolic field to impinge upon a detector (14) which is arranged substantially along the x-axis and comprises, for example, a microchannel plate and phosphor screen, in the vicinity of which the electrons are focussed. The electrodes E1 to E5 are arranged in a plane which is inclined to the general axis of the analyser (i.e. the x-axis parallel to the detector (14)), and the electrode E6 is similarly inclined, but in an opposite direction. The prime feature of the electron energy analyser is the ability to detect electrons with a large range of energies, in parallel.
IPC 1-7
IPC 8 full level
H01J 49/44 (2006.01); G01N 23/225 (2006.01); H01J 49/40 (2006.01); H01J 49/48 (2006.01)
CPC (source: EP)
G01N 23/225 (2013.01); H01J 49/48 (2013.01); H01J 2237/24485 (2013.01)
Citation (search report)
See references of WO 9935668A2
Designated contracting state (EPC)
DE GB NL
DOCDB simple family (publication)
WO 9935668 A2 19990715; WO 9935668 A3 19990923; AU 1975599 A 19990726; EP 1051735 A2 20001115; GB 9800488 D0 19980304; JP 2002501285 A 20020115
DOCDB simple family (application)
GB 9900009 W 19990112; AU 1975599 A 19990112; EP 99900537 A 19990112; GB 9800488 A 19980112; JP 2000527963 A 19990112