EP 1055189 A1 20001129 - DEVICE AND METHOD FOR TESTING SENSORS AND THE USE OF A SENSOR
Title (en)
DEVICE AND METHOD FOR TESTING SENSORS AND THE USE OF A SENSOR
Title (de)
VORRICHTUNG UND VERFAHREN ZUM TESTEN VON SENSOREN UND VERWENDUNG EINES SENSORS
Title (fr)
DISPOSITIF ET PROCEDE PERMETTANT DE TESTER DES DETECTEURS ET UTILISATION D'UN DETECTEUR
Publication
Application
Priority
- DE 9904024 W 19991217
- DE 19857674 A 19981217
Abstract (en)
[origin: DE19857674C1] A device for testing capacitive measurement sensors includes a carrier i.e. a substrate (1) or a semiconductor body or a semiconductor chip on which are mounted the pads (2) required for the test and preferably the electronic components for controlling and evaluating the measurement results are integrated. A dielectric layer (4) is provided between the surface and the pads. The dielectric layer is made of a material whose dielectric constant (relative permittivity) is so heavily dependent on an electric field present in the material that a measurable change in capacitance takes place, when a potential difference between the pads and the conductors arranged over the surface is varied in order to drive the device.
IPC 1-7
IPC 8 full level
G06K 9/00 (2006.01)
CPC (source: EP)
G06V 40/1306 (2022.01)
Citation (search report)
See references of WO 0036550A1
Designated contracting state (EPC)
AT DE FR GB IE IT
DOCDB simple family (publication)
DE 19857674 C1 20000504; EP 1055189 A1 20001129; WO 0036550 A1 20000622
DOCDB simple family (application)
DE 19857674 A 19981217; DE 9904024 W 19991217; EP 99968297 A 19991217