Global Patent Index - EP 1055249 A1

EP 1055249 A1 2000-11-29 - PLASMA ASSISTED PROCESSING CHAMBER WITH SEPARATE CONTROL OF SPECIES DENSITY

Title (en)

PLASMA ASSISTED PROCESSING CHAMBER WITH SEPARATE CONTROL OF SPECIES DENSITY

Title (de)

PLASMA-BEHANDLUNGSKAMMER MIT SEPARATER STEUERUNG DER SPEZIENDICHTE

Title (fr)

CHAMBRE DE TRAITEMENT AU PLASMA AVEC REGLAGE SEPARE DE LA DENSITE DES ESPECES

Publication

EP 1055249 A1 (EN)

Application

EP 99905871 A

Priority

  • US 9902718 W
  • US 2096098 A
  • US 11941798 A

Abstract (en)

[origin: WO9940609A1] The present invention provides an apparatus and method, for plasma assisted processing of a workpiece, which provides for separate control of species density within a processing plasma. The present invention has a processing chamber (102) and at least one collateral chamber (104). The collateral chamber is capable of generating a collateral plasma and delivering it to the processing chamber. To control the densities of the particle species within the processing chamber the present invention may have: a filter (108) interposed between the collateral chamber and the processing chamber, primary chamber source power, several collateral chambers providing separate inputs to the processing chamber, or combinations thereof. Collateral plasma may be: filtered, combined with primary chamber generated plasma, combined with another collateral plasma, or combinations thereof to separately control the densities of the species comprising the processing plasma.

IPC 1-7 (main, further and additional classification)

H01J 37/32

IPC 8 full level (invention and additional information)

H05H 1/46 (2006.01); H01J 37/32 (2006.01); H01L 21/302 (2006.01); H01L 21/3065 (2006.01)

CPC (invention and additional information)

H01J 37/32871 (2013.01)

Citation (search report)

See references of WO 9940609A1

Designated contracting state (EPC)

DE FR GB

EPO simple patent family

WO 9940609 A1 19990812; EP 1055249 A1 20001129; JP 2002503031 A 20020129

INPADOC legal status


2003-03-12 [18D] DEEMED TO BE WITHDRAWN

- Effective date: 20020829

2001-03-07 [RIN1] INVENTOR (CORRECTION)

- Inventor name: YIN, GERALD

2001-03-07 [RIN1] INVENTOR (CORRECTION)

- Inventor name: KOLANDENKO, ARNOLD

2001-03-07 [RIN1] INVENTOR (CORRECTION)

- Inventor name: SHAN, HONG, CHING

2001-03-07 [RIN1] INVENTOR (CORRECTION)

- Inventor name: LOEWENHARDT, PETER

2001-03-07 [RIN1] INVENTOR (CORRECTION)

- Inventor name: LEE, CHII

2001-03-07 [RIN1] INVENTOR (CORRECTION)

- Inventor name: YE, YAN

2001-03-07 [RIN1] INVENTOR (CORRECTION)

- Inventor name: QIAN, XUEYN

2001-03-07 [RIN1] INVENTOR (CORRECTION)

- Inventor name: XU, SONGLIN

2000-11-29 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 20000823

2000-11-29 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A1

- Designated State(s): DE FR GB