EP 1055281 A4 20030611 - OPTICAL MICROSWITCH HAVING ELECTROSTATIC MICROACTUATOR AND METHOD FOR USE THEREOF
Title (en)
OPTICAL MICROSWITCH HAVING ELECTROSTATIC MICROACTUATOR AND METHOD FOR USE THEREOF
Title (de)
OPTISCHE MIKROSCHALTER MIT ELEKTROSTATISCHEN MIKROANTRIEB UND IHN BENUTZENDES VERFAHREN
Title (fr)
MICRORUPTEUR OPTIQUE A MICRO-ORGANE DE COMMANDE ELECTROSTATIQUE ET SON PROCEDE D'UTILISATION
Publication
Application
Priority
- US 9900648 W 19990112
- US 7103898 P 19980113
- US 9680698 P 19980817
Abstract (en)
[origin: WO9937013A1] An optical microswitch (104) for use with a laser beam that extends along a path comprising a body (213) having an inlet port (150) adapted to receive the laser beam and a plurality of outlet ports (151). A plurality of mirrors (103) coupled to a plurality of micromotors (180a, 180b) are carried by the body. The micromotors selectively move the mirrors from a first position out of the path of the laser beam to a second position into the path of the laser beam to direct the laser beam to one of the outlet ports. Each of the micromotors has at least one electrostatically-driven comb assembly therein for moving the respective mirror to one of the first and second positions. A controller is electrically coupled to the micromotors for providing control signals to the micromotors.
IPC 1-7
IPC 8 full level
G02B 6/35 (2006.01); G02B 6/42 (2006.01); G02B 26/08 (2006.01); G11B 7/00 (2006.01); G11B 7/135 (2006.01); G11B 11/105 (2006.01); H02N 1/00 (2006.01); G11B 7/12 (2006.01)
CPC (source: EP KR)
G02B 6/3518 (2013.01 - EP KR); G02B 6/4216 (2013.01 - EP); G02B 26/0833 (2013.01 - EP KR); G02B 26/0841 (2013.01 - EP); G11B 7/122 (2013.01 - EP); G11B 7/1384 (2013.01 - EP); G11B 11/10543 (2013.01 - EP); H01S 3/0941 (2013.01 - KR); H02N 1/008 (2013.01 - EP); G02B 6/3546 (2013.01 - EP); G02B 6/3548 (2013.01 - EP); G02B 6/3566 (2013.01 - EP); G02B 6/357 (2013.01 - EP); G02B 6/358 (2013.01 - EP); G02B 6/3584 (2013.01 - EP)
Citation (search report)
- [XD] US 5025346 A 19910618 - TANG WILLIAM C [US], et al
- [X] DE 19643182 A1 19970430 - SAMSUNG ELECTRONICS CO LTD [KR], et al
- [XP] WO 9812589 A1 19980326 - ASCOM TECH AG [CH], et al
- [X] LEE A P ET AL: "POLYSILICON ANGULAR MICROVIBROMOTORS", JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, IEEE INC. NEW YORK, US, vol. 1, no. 2, 1 June 1992 (1992-06-01), pages 70 - 76, XP000304253, ISSN: 1057-7157
- See references of WO 9937013A1
Designated contracting state (EPC)
CH DE DK FI FR GB IE IT LI NL SE
DOCDB simple family (publication)
WO 9937013 A1 19990722; WO 9937013 A9 19991007; AU 2223299 A 19990802; CA 2318060 A1 19990722; CN 1292945 A 20010425; EP 1055281 A1 20001129; EP 1055281 A4 20030611; JP 2002510059 A 20020402; KR 20010034130 A 20010425; MY 133235 A 20071031; TW 419602 B 20010121
DOCDB simple family (application)
US 9900648 W 19990112; AU 2223299 A 19990112; CA 2318060 A 19990112; CN 99803875 A 19990112; EP 99902194 A 19990112; JP 2000540614 A 19990112; KR 20007007743 A 20000713; MY PI9900100 A 19990112; TW 88100403 A 19990112