Global Patent Index - EP 1057215 A1

EP 1057215 A1 2000-12-06 - METHOD FOR PRODUCING CMOS TRANSISTORS AND RELATED DEVICES

Title (en)

METHOD FOR PRODUCING CMOS TRANSISTORS AND RELATED DEVICES

Title (de)

HERSTELLUNGSVERFAHREN VON CMOS-TRANSISTOREN UND DERARTIGE BAUELEMENTE

Title (fr)

PROCEDE DE REALISATION DE TRANSISTORS CMOS ET DISPOSITIFS ASSOCIES

Publication

EP 1057215 A1 (FR)

Application

EP 99958336 A

Priority

  • FR 9903151 W
  • FR 9816028 A

Abstract (en)

[origin: FR2787634A1] Engraving process comprises etching an active layer or rendering zones of the layer inactive to leave active islands for making sources (12), channels (10) and drains of N-type and P-type transistors. The active islands are covered by an insulating layer (8) e.g. of silicium oxide, covered in turn by a conducting layer (9) of N+ doped polycrystalline silicium, tungsten, molybdenum or aluminum, etched with the transistor grids. The procedure can employ a substrate (4) or glass, plastic or quartz.

IPC 1-7 (main, further and additional classification)

H01L 21/84; H01L 27/12

IPC 8 full level (invention and additional information)

G02F 1/1368 (2006.01); G09F 9/30 (2006.01); G09F 9/35 (2006.01); H01L 21/336 (2006.01); H01L 21/77 (2006.01); H01L 21/8238 (2006.01); H01L 21/84 (2006.01); H01L 27/08 (2006.01); H01L 27/092 (2006.01); H01L 27/12 (2006.01); H01L 29/786 (2006.01)

CPC (invention and additional information)

H01L 27/1214 (2013.01)

Citation (search report)

See references of WO 0038229A1

Designated contracting state (EPC)

DE GB

EPO simple patent family

FR 2787634 A1 20000623; FR 2787634 B1 20030912; EP 1057215 A1 20001206; JP 2002533925 A 20021008; US 6627489 B1 20030930; WO 0038229 A1 20000629

INPADOC legal status


2012-08-15 [18D] DEEMED TO BE WITHDRAWN

- Effective date: 20120221

2006-09-06 [17Q] FIRST EXAMINATION REPORT

- Effective date: 20060803

2004-05-26 [RBV] DESIGNATED CONTRACTING STATES (CORRECTION):

- Designated State(s): DE GB

2001-10-04 [RAP1] TRANSFER OF RIGHTS OF AN EP PUBLISHED APPLICATION

- Owner name: THALES

2000-12-06 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 20000810

2000-12-06 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A1

- Designated State(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE