EP 1058944 A1 20001213 - COOLING SYSTEM WITH ANTIFREEZE FOR COOLING MAGNETRON FOR PROCESS CHAMBER OF PROCESSING SYSTEM
Title (en)
COOLING SYSTEM WITH ANTIFREEZE FOR COOLING MAGNETRON FOR PROCESS CHAMBER OF PROCESSING SYSTEM
Title (de)
KÜHLVORRICHTUNG MIT FROSTSCHUTZMITTEL ZUR KÜHLUNG DES MAGNETRONS IN DER BEHANDLUNGSKAMMER EINES BEHANDLUNGSSYSTEMS
Title (fr)
SYSTEME DE REFROIDISSEMENT A ANTIGEL DESTINE AU REFROIDISSEMENT DE MAGNETRON D'ENCEINTE DE TRAITEMENT D'UN SYSTEME DE TRAITEMENT
Publication
Application
Priority
- US 9903680 W 19990219
- US 3026498 A 19980225
Abstract (en)
[origin: WO9944220A1] A vacuum processing system has a process chamber with a rotating member, such as a magnetron in a PVD chamber, disposed in a cooling chamber containing a free oxygen deficient cooling fluid that circulates into and out of the cooling chamber. The free oxygen deficient cooling fluid may be an ethylene-glycol based coolant or antifreeze. Conduits connect an inlet and an outlet of the cooling chamber to a heat exchanger to cool and re-circulate the free oxygen deficient cooling fluid.
IPC 1-7
IPC 8 full level
H05H 1/46 (2006.01); C23C 14/56 (2006.01); H01J 37/32 (2006.01); H01J 37/34 (2006.01); H01L 21/203 (2006.01)
CPC (source: EP KR)
H01J 37/34 (2013.01 - EP KR); H01J 37/3497 (2013.01 - EP)
Citation (search report)
See references of WO 9944220A1
Designated contracting state (EPC)
BE DE GB NL
DOCDB simple family (publication)
WO 9944220 A1 19990902; EP 1058944 A1 20001213; JP 2002505504 A 20020219; KR 20010041279 A 20010515; TW 432118 B 20010501
DOCDB simple family (application)
US 9903680 W 19990219; EP 99908293 A 19990219; JP 2000533889 A 19990219; KR 20007009377 A 20000824; TW 88102795 A 19990317