Global Patent Index - EP 1058944 A1

EP 1058944 A1 2000-12-13 - COOLING SYSTEM WITH ANTIFREEZE FOR COOLING MAGNETRON FOR PROCESS CHAMBER OF PROCESSING SYSTEM

Title (en)

COOLING SYSTEM WITH ANTIFREEZE FOR COOLING MAGNETRON FOR PROCESS CHAMBER OF PROCESSING SYSTEM

Title (de)

KÜHLVORRICHTUNG MIT FROSTSCHUTZMITTEL ZUR KÜHLUNG DES MAGNETRONS IN DER BEHANDLUNGSKAMMER EINES BEHANDLUNGSSYSTEMS

Title (fr)

SYSTEME DE REFROIDISSEMENT A ANTIGEL DESTINE AU REFROIDISSEMENT DE MAGNETRON D'ENCEINTE DE TRAITEMENT D'UN SYSTEME DE TRAITEMENT

Publication

EP 1058944 A1 (EN)

Application

EP 99908293 A

Priority

  • US 9903680 W
  • US 3026498 A

Abstract (en)

[origin: WO9944220A1] A vacuum processing system has a process chamber with a rotating member, such as a magnetron in a PVD chamber, disposed in a cooling chamber containing a free oxygen deficient cooling fluid that circulates into and out of the cooling chamber. The free oxygen deficient cooling fluid may be an ethylene-glycol based coolant or antifreeze. Conduits connect an inlet and an outlet of the cooling chamber to a heat exchanger to cool and re-circulate the free oxygen deficient cooling fluid.

IPC 1-7 (main, further and additional classification)

H01J 37/34; H01J 37/32

IPC 8 full level (invention and additional information)

H05H 1/46 (2006.01); C23C 14/56 (2006.01); H01J 37/32 (2006.01); H01J 37/34 (2006.01); H01L 21/203 (2006.01)

CPC (invention and additional information)

H01J 37/3497 (2013.01); H01J 37/34 (2013.01)

Citation (search report)

See references of WO 9944220A1

Designated contracting state (EPC)

BE DE GB NL

EPO simple patent family

WO 9944220 A1 19990902; EP 1058944 A1 20001213; JP 2002505504 A 20020219; TW 432118 B 20010501

INPADOC legal status


2002-03-20 [18D] DEEMED TO BE WITHDRAWN

- Effective date: 20010901

2000-12-13 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 20000922

2000-12-13 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A1

- Designated State(s): BE DE GB NL