Global Patent Index - EP 1060474 A2

EP 1060474 A2 2000-12-20 - MEMORY CELL ARRANGEMENT AND METHOD FOR PRODUCING THE SAME

Title (en)

MEMORY CELL ARRANGEMENT AND METHOD FOR PRODUCING THE SAME

Title (de)

SPEICHERZELLENANORDNUNG UND ENTSPRECHENDES HERSTELLUNGSVERFAHREN

Title (fr)

ENSEMBLE DE CELLULES DE MEMOIRE ET SON PROCEDE DE FABRICATION

Publication

EP 1060474 A2 (DE)

Application

EP 99916757 A

Priority

  • DE 9900517 W
  • DE 19807920 A

Abstract (en)

[origin: DE19807920A1] The invention relates to a memory cell arrangement, comprising a number of memory cells (S) arranged in a semiconductor substrate (10) with bit line trenches (1a-1d) running parallel in a longitudinal direction in the main surface of the semiconductor substrate (10). Each bit line trench (1a-1d) is provided with a first conductive area (15a-15d) in the bottom and a second conductive area (20a-20e) of the same conduction type in the top, with a channel area being provided in between in the walls of each trench. Word lines (2a-2c) run in a crosswise direction along the main surface of the semiconductor substrate (10) through certain bit line trenches (1a, 1c, 1d) for controlling the transistors provided there. An additional dopant is introduced into the trench walls of the bit line trenches (1a-1d) situated between the word lines (2a-2c) in order to increase the corresponding transistor cutoff voltage for preventing leakage currents.

IPC 1-7 (main, further and additional classification)

G11C 11/00

IPC 8 full level (invention and additional information)

H01L 21/8246 (2006.01); H01L 27/112 (2006.01)

CPC (invention and additional information)

H01L 27/11273 (2013.01); H01L 27/112 (2013.01)

Citation (search report)

See references of WO 9944204A3

Designated contracting state (EPC)

DE FR GB IT

EPO simple patent family

DE 19807920 A1 19990902; EP 1060474 A2 20001220; JP 2002505516 A 20020219; US 6472696 B1 20021029; WO 9944204 A2 19990902; WO 9944204 A3 19991014

INPADOC legal status


2009-10-21 [18R] REFUSED

- Effective date: 20090615

2008-03-19 [17Q] FIRST EXAMINATION REPORT

- Effective date: 20080218

2000-12-20 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 20000825

2000-12-20 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A2

- Designated State(s): DE FR GB IT