Global Patent Index - EP 1060518 A1

EP 1060518 A1 2000-12-20 - TRENCH-GATE MOS TRANSISTOR, ITS USE IN AN EEPROM DEVICE AND PROCESS FOR MANUFACTURING THE SAME

Title (en)

TRENCH-GATE MOS TRANSISTOR, ITS USE IN AN EEPROM DEVICE AND PROCESS FOR MANUFACTURING THE SAME

Title (de)

GRABEN-GATE-MOS-TRANSISTOR, DESSEN VERWENDUNG IN EINER EEPROM-ANORDNUNG UND VERFAHREN ZU DESSEN HERSTELLUNG

Title (fr)

TRANSISTOR MOS A GRILLE ET TRANCHEE, SON UTILISATION DANS DES SYSTEMES DE MEMOIRES MORTES PROGRAMMABLES EFFA ABLES ELECTRIQUEMENT, ET SON PROCEDE DE PRODUCTION

Publication

EP 1060518 A1 (DE)

Application

EP 99911574 A

Priority

  • DE 9900215 W
  • DE 19807213 A

Abstract (en)

[origin: WO9943029A1] A first source-drain zone (471), a second source/drain zone (472) and an intermediate channel (44) are arranged in a semiconductor substrate (41). The surface of the channel (44) is provided with a gate dielectric (45). A gate electrode (46) is arranged in the channel (44) and is at the most as long as the channel (44) is deep. Gate dielectric (45) and gate electrode (46) are thus buried in the channel (44) and the MOS transistor is suitable as embedded MOS transistor, in particular for EEPROM devices.

IPC 1-7 (main, further and additional classification)

H01L 29/78; H01L 21/336; H01L 29/423

IPC 8 full level (invention and additional information)

H01L 21/336 (2006.01); H01L 21/8247 (2006.01); H01L 27/115 (2006.01); H01L 29/423 (2006.01); H01L 29/78 (2006.01)

CPC (invention and additional information)

H01L 27/11521 (2013.01); H01L 27/115 (2013.01); H01L 29/66621 (2013.01); H01L 29/7834 (2013.01); H01L 29/42368 (2013.01)

Citation (search report)

See references of WO 9943029A1

Designated contracting state (EPC)

DE

EPO simple patent family

WO 9943029 A1 19990826; EP 1060518 A1 20001220; TW 442949 B 20010623

INPADOC legal status


2002-08-28 [18W] WITHDRAWN

- Ref Legal Event Code: 18W

- Date of withdrawal: 20020527

2000-12-20 [17P] REQUEST FOR EXAMINATION FILED

- Ref Legal Event Code: 17P

- Effective date: 20000711

2000-12-20 [AK] DESIGNATED CONTRACTING STATES:

- Ref Legal Event Code: AK

- Designated State(s): DE