EP 1061262 A2 20001220 - Turbo-molecular pump
Title (en)
Turbo-molecular pump
Title (de)
Turbomolekularpumpe
Title (fr)
Pompe turbo-moléculaire
Publication
Application
Priority
JP 16663799 A 19990614
Abstract (en)
A turbo-molecular pump includes a casing having an intake port (14a), a stator (S) fixedly mounted in the casing (14), and a rotor (R) supported in the casing (14) for rotation relatively to the stator. The stator and the rotor make up a turbine blade pumping section (L1) and a groove pumping section (L2) for evacuating gas. A scattering prevention member (50) is provided for preventing fragments of the rotor (R) from being scattered through the intake port (14a). <IMAGE>
IPC 1-7
IPC 8 full level
F04D 19/04 (2006.01); F04D 29/66 (2006.01)
CPC (source: EP KR)
F04D 19/04 (2013.01 - KR); F04D 19/042 (2013.01 - EP); F04D 29/701 (2013.01 - EP)
Designated contracting state (EPC)
DE FR GB
DOCDB simple family (publication)
EP 1061262 A2 20001220; EP 1061262 A3 20020306; EP 1061262 B1 20071226; DE 60037554 D1 20080207; DE 60037554 T2 20090108; KR 20010007349 A 20010126
DOCDB simple family (application)
EP 00112625 A 20000614; DE 60037554 T 20000614; KR 20000032305 A 20000613