EP 1061262 A3 20020306 - Turbo-molecular pump
Title (en)
Turbo-molecular pump
Title (de)
Turbomolekularpumpe
Title (fr)
Pompe turbo-moléculaire
Publication
Application
Priority
JP 16663799 A 19990614
Abstract (en)
[origin: EP1061262A2] A turbo-molecular pump includes a casing having an intake port (14a), a stator (S) fixedly mounted in the casing (14), and a rotor (R) supported in the casing (14) for rotation relatively to the stator. The stator and the rotor make up a turbine blade pumping section (L1) and a groove pumping section (L2) for evacuating gas. A scattering prevention member (50) is provided for preventing fragments of the rotor (R) from being scattered through the intake port (14a). <IMAGE>
IPC 1-7
IPC 8 full level
F04D 19/04 (2006.01); F04D 29/66 (2006.01)
CPC (source: EP KR)
F04D 19/04 (2013.01 - KR); F04D 19/042 (2013.01 - EP); F04D 29/701 (2013.01 - EP)
Citation (search report)
- [A] EP 0332107 A1 19890913 - TOSHIBA KK [JP], et al
- [A] US 5528618 A 19960618 - SCHLIE LAVERNE A [US], et al
- [A] US 4787829 A 19881129 - MIYAZAKI MASAYUKI [JP], et al
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
DOCDB simple family (publication)
EP 1061262 A2 20001220; EP 1061262 A3 20020306; EP 1061262 B1 20071226; DE 60037554 D1 20080207; DE 60037554 T2 20090108; KR 20010007349 A 20010126
DOCDB simple family (application)
EP 00112625 A 20000614; DE 60037554 T 20000614; KR 20000032305 A 20000613