Global Patent Index - EP 1062681 A1

EP 1062681 A1 2000-12-27 - PRODUCTION FACILITY FOR INTEGRATED CIRCUITS

Title (en)

PRODUCTION FACILITY FOR INTEGRATED CIRCUITS

Title (de)

PRODUKTIONSANLAGE FÜR INTEGRIERTE SCHALTUNGEN

Title (fr)

EQUIPEMENT POUR LA FABRICATION DE CIRCUITS INTEGRES

Publication

EP 1062681 A1 (EN)

Application

EP 98909871 A

Priority

NL 9800143 W

Abstract (en)

[origin: WO9946803A1] The invention relates to a production facility for integrated circuits, comprising: at least one cleanroom, in which processing means for processing raw materials like wafers into integrated circuits have been located; and associated equipment for said cleanroom and the processing means located therein, characterized in that: the production facility is divided into mutually separated process cells, separated by walls; each process cell comprises a cleanroom; each cleanroom is equipped with processing means for executing processes requiring substantially similar conditions; each process cell comprises associated equipment for said cleanroom in the same process cell; and the associated equipment in said process cell is dedicated for maintaining the conditions required for the process equipment in said cleanroom. The features of the invention lead to a facility, in which the local processing and environmental conditions are optimised to local needs. In addition the realisation period of the production facility is significantly reduced.

IPC 1-7 (main, further and additional classification)

H01L 21/00

IPC 8 full level (invention and additional information)

H01L 21/677 (2006.01)

CPC (invention and additional information)

H01L 21/67727 (2013.01)

Citation (search report)

See references of WO 9946803A1

Designated contracting state (EPC)

BE DE FR GB IE IT NL

EPO simple patent family

WO 9946803 A1 19990916; AU 6424098 A 19990927; CN 1286802 A 20010307; EP 1062681 A1 20001227; TW 440890 B 20010616

INPADOC legal status


2004-04-07 [18D] DEEMED TO BE WITHDRAWN

- Effective date: 20031001

2000-12-27 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 20000821

2000-12-27 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A1

- Designated State(s): BE DE FR GB IE IT NL