EP 1062681 A1 20001227 - PRODUCTION FACILITY FOR INTEGRATED CIRCUITS
Title (en)
PRODUCTION FACILITY FOR INTEGRATED CIRCUITS
Title (de)
PRODUKTIONSANLAGE FÜR INTEGRIERTE SCHALTUNGEN
Title (fr)
EQUIPEMENT POUR LA FABRICATION DE CIRCUITS INTEGRES
Publication
Application
Priority
NL 9800143 W 19980311
Abstract (en)
[origin: WO9946803A1] The invention relates to a production facility for integrated circuits, comprising: at least one cleanroom, in which processing means for processing raw materials like wafers into integrated circuits have been located; and associated equipment for said cleanroom and the processing means located therein, characterized in that: the production facility is divided into mutually separated process cells, separated by walls; each process cell comprises a cleanroom; each cleanroom is equipped with processing means for executing processes requiring substantially similar conditions; each process cell comprises associated equipment for said cleanroom in the same process cell; and the associated equipment in said process cell is dedicated for maintaining the conditions required for the process equipment in said cleanroom. The features of the invention lead to a facility, in which the local processing and environmental conditions are optimised to local needs. In addition the realisation period of the production facility is significantly reduced.
IPC 1-7
IPC 8 full level
H01L 21/677 (2006.01)
CPC (source: EP)
H01L 21/67727 (2013.01)
Citation (search report)
See references of WO 9946803A1
Designated contracting state (EPC)
BE DE FR GB IE IT NL
DOCDB simple family (publication)
WO 9946803 A1 19990916; AU 6424098 A 19990927; CN 1286802 A 20010307; EP 1062681 A1 20001227; TW 440890 B 20010616
DOCDB simple family (application)
NL 9800143 W 19980311; AU 6424098 A 19980311; CN 98813888 A 19980311; EP 98909871 A 19980311; TW 88108651 A 19990526