Global Patent Index - EP 1062696 A1

EP 1062696 A1 2000-12-27 - INTEGRATED ELECTRONIC CIRCUIT AND METHOD FOR PRODUCING THE SAME

Title (en)

INTEGRATED ELECTRONIC CIRCUIT AND METHOD FOR PRODUCING THE SAME

Title (de)

INTEGRIERTE ELEKTRONISCHE SCHALTUNGSANORDNUNG UND VERFAHREN ZU IHRER HERSTELLUNG

Title (fr)

CIRCUIT ELECTRONIQUE INTEGRE ET SON PROCEDE DE PRODUCTION

Publication

EP 1062696 A1 (DE)

Application

EP 99917747 A

Priority

  • DE 9900437 W
  • DE 19810825 A

Abstract (en)

[origin: DE19810825A1] The integrated circuit has a semiconductor substrate (10), at least one inductance and at least one insulation region. The insulation region is formed from a porous semiconductor material (50). The insulation region extends deeper into the semiconductor substrate than the inductance. The porous semiconductor material and the semiconductor substrate preferably contain the same semiconductor elements. The porosity of the semiconductor material is preferably between 20 and 80 %. The material may be chemically transformed to improve its insulation properties. The material may e.g. be nitridised or oxidised.

IPC 1-7 (main, further and additional classification)

H01L 21/762; H01L 21/02; H01L 27/06

IPC 8 full level (invention and additional information)

H01L 21/76 (2006.01); H01L 21/02 (2006.01); H01L 21/822 (2006.01); H01L 27/04 (2006.01); H01L 27/06 (2006.01); H01L 27/08 (2006.01)

CPC (invention and additional information)

H01L 28/10 (2013.01); H01L 21/822 (2013.01); H01L 27/0688 (2013.01); H01L 27/08 (2013.01)

Citation (search report)

See references of WO 9946815A1

Designated contracting state (EPC)

DE FR GB IT

EPO simple patent family

DE 19810825 A1 19990916; CN 1301398 A 20010627; EP 1062696 A1 20001227; JP 2002507060 A 20020305; WO 9946815 A1 19990916

INPADOC legal status


2004-03-03 [18D] DEEMED TO BE WITHDRAWN

- Effective date: 20030902

2001-01-10 [RAP1] TRANSFER OF RIGHTS OF AN EP PUBLISHED APPLICATION

- Owner name: INFINEON TECHNOLOGIES AG

2000-12-27 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 20000912

2000-12-27 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A1

- Designated State(s): DE FR GB IT