Global Patent Index - EP 1064527 A1

EP 1064527 A1 2001-01-03 - METHOD AND APPARATUS FOR MEASURING SUBSTRATE TEMPERATURES

Title (en)

METHOD AND APPARATUS FOR MEASURING SUBSTRATE TEMPERATURES

Title (de)

VERFAHREN UND VORRICHTUNG ZUM MESSEN VON SUBSTRATTEMPERATUREN

Title (fr)

PROCEDE ET APPAREIL DE MESURE DE TEMPERATURE DE SUBSTRATS

Publication

EP 1064527 A1 (EN)

Application

EP 99908403 A

Priority

  • US 9903978 W
  • US 4421798 A

Abstract (en)

[origin: WO9947901A1] A method of correcting a temperature probe reading in a thermal processing chamber for heating a substrate, including the steps of heating the substrate to a process temperature and using a first, a second and a third probe to measure the temperature of the substrate. The first probe has a first effective reflectivity and the second probe has a second effective reflectivity. The first probe produces a first temperature indication, the second probe produces a second temperature indication and the third probe produces a third temperature indication. The first and second effective reflectivities may be different. From the first and second temperature indications, a corrected temperature reading for the first probe may be derived, wherein the corrected temperature reading is a more accurate indicator of an actual temperature of the substrate than an uncorrected readings produced by both the first and second probes.

IPC 1-7 (main, further and additional classification)

G01J 5/00; G01J 5/04

IPC 8 full level (invention and additional information)

G01J 5/02 (2006.01); G01J 5/00 (2006.01); G01J 5/04 (2006.01); G01J 5/10 (2006.01); H01L 21/26 (2006.01); H01L 21/31 (2006.01)

CPC (invention and additional information)

G01J 5/08 (2013.01); G01J 5/0003 (2013.01); G01J 5/0007 (2013.01); G01J 5/0815 (2013.01); G01J 5/0818 (2013.01); G01J 5/0821 (2013.01); G01J 5/0846 (2013.01); G01J 5/0887 (2013.01); G01J 5/522 (2013.01); G01J 2005/0048 (2013.01); G01J 2005/068 (2013.01); H01L 22/10 (2013.01); H01L 2924/0002 (2013.01)

Combination set (CPC)

H01L 2924/0002 + H01L 2924/00

Citation (search report)

See references of WO 9947901A1

Designated contracting state (EPC)

DE FR GB IT NL

EPO simple patent family

WO 9947901 A1 19990923; DE 69916256 D1 20040513; DE 69916256 T2 20050414; EP 1064527 A1 20010103; EP 1064527 B1 20040407; JP 2002506988 A 20020305; JP 4511724 B2 20100728; KR 100396423 B1 20030902; TW 455676 B 20010921; US 6179466 B1 20010130

INPADOC legal status


2008-01-31 [PG25 DE] LAPSED IN A CONTRACTING STATE ANNOUNCED VIA POSTGRANT INFORM. FROM NAT. OFFICE TO EPO

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2008-01-31 [PG25 NL] LAPSED IN A CONTRACTING STATE ANNOUNCED VIA POSTGRANT INFORM. FROM NAT. OFFICE TO EPO

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- Effective date: 20070901

2007-11-01 [NLV4] NL: LAPSED OR ANULLED DUE TO NON-PAYMENT OF THE ANNUAL FEE

- Effective date: 20070901

2006-02-28 [PGFP DE] POSTGRANT: ANNUAL FEES PAID TO NATIONAL OFFICE

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- Payment date: 20060228

- Year of fee payment: 8

2006-01-09 [PGFP NL] POSTGRANT: ANNUAL FEES PAID TO NATIONAL OFFICE

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2005-10-12 [GBPC] GB: EUROPEAN PATENT CEASED THROUGH NON-PAYMENT OF RENEWAL FEE

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2005-03-30 [26N] NO OPPOSITION FILED

- Effective date: 20050110

2005-03-25 [EN] FR: TRANSLATION NOT FILED

2005-02-23 [PG25 GB] LAPSED IN A CONTRACTING STATE ANNOUNCED VIA POSTGRANT INFORM. FROM NAT. OFFICE TO EPO

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2004-05-13 [REF] CORRESPONDS TO:

- Document: DE 69916256 P 20040513

2004-04-07 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: B1

- Designated State(s): DE FR GB IT NL

2004-04-07 [REG GB FG4D] EUROPEAN PATENT GRANTED

2004-04-07 [PG25 FR] LAPSED IN A CONTRACTING STATE ANNOUNCED VIA POSTGRANT INFORM. FROM NAT. OFFICE TO EPO

- Ref Country Code: FR

- Free text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

- Effective date: 20040407

2004-04-07 [PG25 IT] LAPSED IN A CONTRACTING STATE ANNOUNCED VIA POSTGRANT INFORM. FROM NAT. OFFICE TO EPO

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- Free text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

- Effective date: 20040407

2002-01-02 [17Q] FIRST EXAMINATION REPORT

- Effective date: 20011121

2001-01-03 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 20001006

2001-01-03 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A1

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