EP 1064713 A2 20010103 - EXPOSURE DEVICE HAVING A PLANAR MOTOR
Title (en)
EXPOSURE DEVICE HAVING A PLANAR MOTOR
Title (de)
BELICHTUNGSVORRICHTUNG MIT PLANAREN MOTOR
Title (fr)
DIAPHRAGME OPTIQUE A MOTEUR PLAN
Publication
Application
Priority
- JP 19387898 A 19980709
- US 9915278 W 19990707
Abstract (en)
[origin: WO0003301A2] Disclosed is a planar motor device capable of effectively restraining thermal influence on the environment. When an electric current is supplied to armature coils (38) opposed to the magnet of a movable member (51), the movable member (51) is driven along a movement surface (21a) by electromagnetic force. When the movable member (51) is continued to be driven in a certain direction, electric current is supplied to the armature coils (38) opposed to the magnet for each movement position of the movable member (51), whereby the armature coils (38) supplied with electric current generate heat. The armature coils (38) are accommodated in a vacuum chamber (41) in a base (21), and are arranged so as to be in contact with a stator yoke (43), with a predetermined gap being defined between them and a ceramic plate (36) forming the vacuum chamber (41). Thus, the heat transmission from the armature coils (38) to the movement surface (21a) side is effected substantially by radiation alone, so that it is possible to effectively restrain thermal influence on the environment.
IPC 1-7
IPC 8 full level
H01J 37/20 (2006.01); G03F 7/20 (2006.01); H01L 21/027 (2006.01); H01L 21/68 (2006.01); H02K 41/02 (2006.01); H02K 41/03 (2006.01)
CPC (source: EP)
G03F 7/70716 (2013.01); G03F 7/70758 (2013.01); G03F 7/70858 (2013.01); H02K 41/031 (2013.01); H02K 2201/18 (2013.01)
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
DOCDB simple family (publication)
WO 0003301 A2 20000120; WO 0003301 A3 20000316; WO 0003301 A9 20000525; AU 4972099 A 20000201; EP 1064713 A2 20010103; EP 1064713 A4 20050720; JP 2000032733 A 20000128; JP 4088728 B2 20080521
DOCDB simple family (application)
US 9915278 W 19990707; AU 4972099 A 19990707; EP 99933725 A 19990707; JP 19387898 A 19980709