Global Patent Index - EP 1064713 A2

EP 1064713 A2 2001-01-03 - EXPOSURE DEVICE HAVING A PLANAR MOTOR

Title (en)

EXPOSURE DEVICE HAVING A PLANAR MOTOR

Title (de)

BELICHTUNGSVORRICHTUNG MIT PLANAREN MOTOR

Title (fr)

DIAPHRAGME OPTIQUE A MOTEUR PLAN

Publication

EP 1064713 A2 (EN)

Application

EP 99933725 A

Priority

  • JP 19387898 A
  • US 9915278 W

Abstract (en)

[origin: WO0003301A2] Disclosed is a planar motor device capable of effectively restraining thermal influence on the environment. When an electric current is supplied to armature coils (38) opposed to the magnet of a movable member (51), the movable member (51) is driven along a movement surface (21a) by electromagnetic force. When the movable member (51) is continued to be driven in a certain direction, electric current is supplied to the armature coils (38) opposed to the magnet for each movement position of the movable member (51), whereby the armature coils (38) supplied with electric current generate heat. The armature coils (38) are accommodated in a vacuum chamber (41) in a base (21), and are arranged so as to be in contact with a stator yoke (43), with a predetermined gap being defined between them and a ceramic plate (36) forming the vacuum chamber (41). Thus, the heat transmission from the armature coils (38) to the movement surface (21a) side is effected substantially by radiation alone, so that it is possible to effectively restrain thermal influence on the environment.

IPC 1-7 (main, further and additional classification)

H02K 41/00; G03F 7/20

IPC 8 full level (invention and additional information)

H01J 37/20 (2006.01); G03F 7/20 (2006.01); H01L 21/027 (2006.01); H01L 21/68 (2006.01); H02K 41/02 (2006.01); H02K 41/03 (2006.01)

CPC (invention and additional information)

G03F 7/70716 (2013.01); G03F 7/70758 (2013.01); G03F 7/70858 (2013.01); H02K 41/031 (2013.01); H02K 2201/18 (2013.01)

Designated contracting state (EPC)

AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

EPO simple patent family

WO 0003301 A2 20000120; WO 0003301 A3 20000316; WO 0003301 A9 20000525; AU 4972099 A 20000201; EP 1064713 A2 20010103; EP 1064713 A4 20050720; JP 2000032733 A 20000128; JP 4088728 B2 20080521

INPADOC legal status


2011-04-06 [18D] DEEMED TO BE WITHDRAWN

- Effective date: 20101007

2010-07-28 [RAP1] TRANSFER OF RIGHTS OF AN EP PUBLISHED APPLICATION

- Owner name: NIKON CORPORATION

2010-07-28 [RAP1] TRANSFER OF RIGHTS OF AN EP PUBLISHED APPLICATION

- Owner name: HAZELTON, ANDREW J.

2005-07-20 [A4] SUPPLEMENTARY SEARCH REPORT

- Effective date: 20050603

2005-07-20 [RIC1] CLASSIFICATION (CORRECTION)

- IPC: 7H 02K 41/00 A

2005-07-20 [RIC1] CLASSIFICATION (CORRECTION)

- IPC: 7G 03F 7/20 B

2001-01-03 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 20001019

2001-01-03 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A2

- Designated State(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE