EP 1065385 A3 20010411 - Method of operating a multi-chamber vacuum system
Title (en)
Method of operating a multi-chamber vacuum system
Title (de)
Verfahren zum Betrieb einer Mehrkammer-Vakuumanlage
Title (fr)
Procédé d' operation un dispositif à vide à compartiments multiples
Publication
Application
Priority
DE 19929519 A 19990628
Abstract (en)
[origin: EP1065385A2] The method involves generating a pre-vacuum with a vacuum pump (4), which is separated from the atmosphere by a first valve (5), for a high vacuum pump (3) connected to a first vacuum chamber. The vacuum pump also generates the vacuum in a second vacuum chamber (2). During the full operation of the high vacuum pump, the first valve is closed and a second valve to evacuate the second vacuum chamber is opened.
IPC 1-7
IPC 8 full level
F04B 37/16 (2006.01); F04D 19/04 (2006.01); F04D 25/16 (2006.01); F04D 27/00 (2006.01)
CPC (source: EP US)
F04D 19/046 (2013.01 - EP US); Y10T 137/0318 (2015.04 - EP US); Y10T 137/86083 (2015.04 - EP US); Y10T 137/86131 (2015.04 - EP US)
Citation (search report)
- [A] DE 19645104 A1 19980507 - LISMONT HEDWIG [DE]
- [A] US 5228838 A 19930720 - GEBELE THOMAS [DE], et al
- [A] EP 0510656 A2 19921028 - HITACHI LTD [JP]
- [A] US 6004109 A 19991221 - GEBELE THOMAS [DE], et al
- [A] US 5733104 A 19980331 - CONRAD ARMIN [DE], et al
- [A] US 5244352 A 19930914 - MUGELE KURT-WILLY [DE]
- [A] EP 0690235 A2 19960103 - EBARA CORP [JP], et al
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
DOCDB simple family (publication)
EP 1065385 A2 20010103; EP 1065385 A3 20010411; EP 1065385 B1 20030730; AT E246317 T1 20030815; DE 19929519 A1 20010104; DE 50003072 D1 20030904; JP 2001020860 A 20010123; US 6446651 B1 20020910
DOCDB simple family (application)
EP 00112484 A 20000613; AT 00112484 T 20000613; DE 19929519 A 19990628; DE 50003072 T 20000613; JP 2000190815 A 20000626; US 60445200 A 20000627