Global Patent Index - EP 1065385 A3

EP 1065385 A3 20010411 - Method of operating a multi-chamber vacuum system

Title (en)

Method of operating a multi-chamber vacuum system

Title (de)

Verfahren zum Betrieb einer Mehrkammer-Vakuumanlage

Title (fr)

Procédé d' operation un dispositif à vide à compartiments multiples

Publication

EP 1065385 A3 20010411 (DE)

Application

EP 00112484 A 20000613

Priority

DE 19929519 A 19990628

Abstract (en)

[origin: EP1065385A2] The method involves generating a pre-vacuum with a vacuum pump (4), which is separated from the atmosphere by a first valve (5), for a high vacuum pump (3) connected to a first vacuum chamber. The vacuum pump also generates the vacuum in a second vacuum chamber (2). During the full operation of the high vacuum pump, the first valve is closed and a second valve to evacuate the second vacuum chamber is opened.

IPC 1-7

F04D 27/00; F04D 25/16

IPC 8 full level

F04B 37/16 (2006.01); F04D 19/04 (2006.01); F04D 25/16 (2006.01); F04D 27/00 (2006.01)

CPC (source: EP US)

F04D 19/046 (2013.01 - EP US); Y10T 137/0318 (2015.04 - EP US); Y10T 137/86083 (2015.04 - EP US); Y10T 137/86131 (2015.04 - EP US)

Citation (search report)

Designated contracting state (EPC)

AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

DOCDB simple family (publication)

EP 1065385 A2 20010103; EP 1065385 A3 20010411; EP 1065385 B1 20030730; AT 246317 T 20030815; DE 19929519 A1 20010104; DE 50003072 D1 20030904; JP 2001020860 A 20010123; US 6446651 B1 20020910

DOCDB simple family (application)

EP 00112484 A 20000613; AT 00112484 T 20000613; DE 19929519 A 19990628; DE 50003072 T 20000613; JP 2000190815 A 20000626; US 60445200 A 20000627