EP 1067290 A3 20010411 - Vacuum pump
Title (en)
Vacuum pump
Title (de)
Vakuumpumpe
Title (fr)
Pompe à vide
Publication
Application
Priority
DE 19930952 A 19990705
Abstract (en)
[origin: EP1067290A2] The vacuum pump has two parallel single or multiple stage gas friction pumps (6,7) and a multiple stage pump (8) connected after them. The sub-flows passing via the two gas friction pumps are fed via connecting elements to ejection regions (23,24) and then to an ejection vol. (25) connected via pipelines to the suction chamber (27) of the next pump stage so that the next stage performs further compression and delivers the gas to another ejection vol.
IPC 1-7
IPC 8 full level
F04D 17/16 (2006.01); F04D 19/04 (2006.01); F04D 29/22 (2006.01); F04D 29/26 (2006.01); F04D 29/44 (2006.01)
CPC (source: EP US)
F04D 17/168 (2013.01 - EP US); F04D 19/044 (2013.01 - EP US); F04D 19/046 (2013.01 - EP US); F04D 23/008 (2013.01 - EP US)
Citation (search report)
- [A] US 4919599 A 19900424 - REICH GUNTER [DE], et al
- [A] US 5116196 A 19920526 - BARET GILLES [FR], et al
- [A] DE 3826710 A1 19890216 - JAPAN ATOMIC ENERGY RES INST [JP], et al
- [A] US 5893702 A 19990413 - CONRAD ARMIN [DE], et al
- [A] US 4787829 A 19881129 - MIYAZAKI MASAYUKI [JP], et al
- [A] EP 0805275 A2 19971105 - BOC GROUP PLC [GB]
- [A] US 5733104 A 19980331 - CONRAD ARMIN [DE], et al
- [A] US 3644051 A 19720222 - SHAPIRO ASCHER H
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
DOCDB simple family (publication)
EP 1067290 A2 20010110; EP 1067290 A3 20010411; EP 1067290 B1 20030730; AT E246315 T1 20030815; DE 19930952 A1 20010111; DE 50003075 D1 20030904; JP 2001027195 A 20010130; JP 4584420 B2 20101124; US 6409477 B1 20020625
DOCDB simple family (application)
EP 00112483 A 20000613; AT 00112483 T 20000613; DE 19930952 A 19990705; DE 50003075 T 20000613; JP 2000194357 A 20000628; US 60997800 A 20000705