Global patent index - EP 1068019 A1

EP 1068019 A1 2001-01-17 - ENERGY EMISSION SYSTEM FOR PHOTOLITHOGRAPHY

Title (en)

ENERGY EMISSION SYSTEM FOR PHOTOLITHOGRAPHY

Title (de)

ENERGIE-EMISSIONSSYSTEM FÜR PHOTOLITHOGRAPHIE

Title (fr)

SYSTEME D'EMISSION D'ENERGIE POUR PHOTOLITHOGRAPHIE

Publication

EP 1068019 A1 (EN)

Application

EP 99915262 A

Priority

  • US 9907429 W
  • US 5497798 A
  • US 5502498 A

Abstract (en)

[origin: WO9951357A1] An emitted energy system is provided. The emitted energy system (10) may include a fluid (34) communicated through a nozzle (22). The fluid (34) communicated through the nozzle (22) may form a fluid plume (40). An input energy (64) may be applied to the fluid (34) in the fluid plume (40). The input energy (64) may excite the fluid (34) in the fluid plume (40) into producing an emitted energy (16). The emitted energy (16) is collected and directed by an output optics (18) to a target (20). In one embodiment, the target (20) is a photolithography system interface (68) for fabricating a semiconductor device (70). A remotely-controlled XYZ micro-positioning stage (620) facilitates alignment of the nozzle (510) and the diffuser (512) to the radiated energy beam.

IPC 1-7 (main, further and additional classification)

B05B 1/34; H05G 2/00

IPC 8 full level (invention and additional information)

B05B 1/34 (2006.01); G03F 7/20 (2006.01); H01L 21/027 (2006.01); H05G 1/00 (2006.01); H05G 2/00 (2006.01)

CPC (invention and additional information)

H05G 2/003 (2013.01); B82Y 10/00 (2013.01); G03F 7/70033 (2013.01); G03F 7/70858 (2013.01); H05G 2/008 (2013.01)

Citation (search report)

See references of WO 9951357A1

Designated contracting state (EPC)

DE FR IT NL

EPO simple patent family

WO 9951357 A1 19991014; AU 3381799 A 19991025; EP 1068019 A1 20010117; JP 2002510548 A 20020409

INPADOC legal status

2008-05-07 [18D] DEEMED TO BE WITHDRAWN

- Ref Legal Event Code: 18D

- Effective date: 20071031

2007-08-01 [17Q] FIRST EXAMINATION REPORT

- Ref Legal Event Code: 17Q

- Effective date: 20070628

2001-09-26 [RAP1] TRANSFER OF RIGHTS OF AN EP PUBLISHED APPLICATION

- Owner name: ADVANCED ENERGY SYSTEMS, INC.

- Ref Legal Event Code: RAP1

2001-01-17 [17P] REQUEST FOR EXAMINATION FILED

- Ref Legal Event Code: 17P

- Effective date: 20001019

2001-01-17 [AK] DESIGNATED CONTRACTING STATES:

- Ref Legal Event Code: AK

- Designated State(s): DE FR IT NL