EP 1068020 A1 20010117 - FLUID NOZZLE SYSTEM , ENERGY EMISSION SYSTEM FOR PHOTOLITHOGRAPHY AND ITS METHOD OF MANUFACTURE
Title (en)
FLUID NOZZLE SYSTEM , ENERGY EMISSION SYSTEM FOR PHOTOLITHOGRAPHY AND ITS METHOD OF MANUFACTURE
Title (de)
FLUID-DÜSENSYSTEM, ENERGIE-EMISSIONSSYSTEM FÜR PHOTOLITHOGRAPHIE UND VERFAHREN ZUR HERSTELLUNG
Title (fr)
AJUTAGE DE LIQUIDE, SYSTEME D'EMISSION D'ENERGIE POUR PHOTOLITHOGRAPHIE ET SON PROCEDE DE FABRICATION
Publication
Application
Priority
- US 9907414 W 19990402
- US 5483198 A 19980403
- US 5498798 A 19980403
Abstract (en)
[origin: WO9951356A1] An emitted energy system for use in photolithography may include a fluid nozzle. A nozzle and its method of manufacture are provided. A nozzle (22) may include a nozzle cavity (110) disposed within a nozzle body (100) between an up-stream end (102) and a down-stream end (104). A nozzle passage (118) may be defined within the nozzle cavity (110) and extend a longitudinal length (120) from the down-stream end (104) of the nozzle body (100) into the nozzle cavity (110). A discharge orifice (124) may also be defined at the down-stream end (104) of the nozzle cavity (110) and have an associated width (126). The width (126) of the discharge orifice (124) may be substantially less than the longitudinal length (120) of the nozzle passage (118). The method of manufacture may include fabricating a recess (206) in a first side (202) of an article (200). An article passage (216) may be fabricated between a second side (204) of the article (200) and the recess (206). An insert (220) may be provided sized to fit the recess (206). An insert passage (230) may be fabricated in the insert (220). The insert (220) may then be secured in the recess (206), with the insert passage (230) and the article passage (216) aligned.
IPC 1-7
IPC 8 full level
B05B 1/00 (2006.01); B05B 1/34 (2006.01); G03F 7/20 (2006.01); H01L 21/027 (2006.01); H05G 2/00 (2006.01)
CPC (source: EP)
B05B 1/005 (2013.01); B82Y 10/00 (2013.01); G03F 7/70033 (2013.01); G03F 7/70858 (2013.01); H05G 2/003 (2013.01)
Citation (search report)
See references of WO 9951356A1
Designated contracting state (EPC)
DE FR IT NL
DOCDB simple family (publication)
WO 9951356 A1 19991014; AU 3469999 A 19991025; EP 1068020 A1 20010117; JP 2002510874 A 20020409
DOCDB simple family (application)
US 9907414 W 19990402; AU 3469999 A 19990402; EP 99916360 A 19990402; JP 2000542115 A 19990402