Global patent index - EP 1068020 A1

EP 1068020 A1 2001-01-17 - FLUID NOZZLE SYSTEM , ENERGY EMISSION SYSTEM FOR PHOTOLITHOGRAPHY AND ITS METHOD OF MANUFACTURE

Title (en)

FLUID NOZZLE SYSTEM , ENERGY EMISSION SYSTEM FOR PHOTOLITHOGRAPHY AND ITS METHOD OF MANUFACTURE

Title (de)

FLUID-DÜSENSYSTEM, ENERGIE-EMISSIONSSYSTEM FÜR PHOTOLITHOGRAPHIE UND VERFAHREN ZUR HERSTELLUNG

Title (fr)

AJUTAGE DE LIQUIDE, SYSTEME D'EMISSION D'ENERGIE POUR PHOTOLITHOGRAPHIE ET SON PROCEDE DE FABRICATION

Publication

EP 1068020 A1 (EN)

Application

EP 99916360 A

Priority

  • US 9907414 W
  • US 5483198 A
  • US 5498798 A

Abstract (en)

[origin: WO9951356A1] An emitted energy system for use in photolithography may include a fluid nozzle. A nozzle and its method of manufacture are provided. A nozzle (22) may include a nozzle cavity (110) disposed within a nozzle body (100) between an up-stream end (102) and a down-stream end (104). A nozzle passage (118) may be defined within the nozzle cavity (110) and extend a longitudinal length (120) from the down-stream end (104) of the nozzle body (100) into the nozzle cavity (110). A discharge orifice (124) may also be defined at the down-stream end (104) of the nozzle cavity (110) and have an associated width (126). The width (126) of the discharge orifice (124) may be substantially less than the longitudinal length (120) of the nozzle passage (118). The method of manufacture may include fabricating a recess (206) in a first side (202) of an article (200). An article passage (216) may be fabricated between a second side (204) of the article (200) and the recess (206). An insert (220) may be provided sized to fit the recess (206). An insert passage (230) may be fabricated in the insert (220). The insert (220) may then be secured in the recess (206), with the insert passage (230) and the article passage (216) aligned.

IPC 1-7 (main, further and additional classification)

B05B 1/34; H05G 2/00

IPC 8 full level (invention and additional information)

B05B 1/00 (2006.01); B05B 1/34 (2006.01); G03F 7/20 (2006.01); H01L 21/027 (2006.01); H05G 2/00 (2006.01)

CPC (invention and additional information)

H05G 2/003 (2013.01); B05B 1/005 (2013.01); B82Y 10/00 (2013.01); G03F 7/70033 (2013.01); G03F 7/70858 (2013.01)

Citation (search report)

See references of WO 9951356A1

Designated contracting state (EPC)

DE FR IT NL

EPO simple patent family

WO 9951356 A1 19991014; AU 3469999 A 19991025; EP 1068020 A1 20010117; JP 2002510874 A 20020409

INPADOC legal status

2008-05-07 [18D] DEEMED TO BE WITHDRAWN

- Ref Legal Event Code: 18D

- Effective date: 20071109

2007-08-01 [17Q] FIRST EXAMINATION REPORT

- Ref Legal Event Code: 17Q

- Effective date: 20070628

2001-11-21 [RAP1] TRANSFER OF RIGHTS OF AN EP PUBLISHED APPLICATION

- Owner name: ADVANCED ENERGY SYSTEMS, INC.

- Ref Legal Event Code: RAP1

2001-01-17 [17P] REQUEST FOR EXAMINATION FILED

- Ref Legal Event Code: 17P

- Effective date: 20001023

2001-01-17 [AK] DESIGNATED CONTRACTING STATES:

- Ref Legal Event Code: AK

- Designated State(s): DE FR IT NL