Global Patent Index - EP 1068646 A1

EP 1068646 A1 2001-01-17 - METHOD FOR DOPING ONE SIDE OF A SEMICONDUCTOR BODY

Title (en)

METHOD FOR DOPING ONE SIDE OF A SEMICONDUCTOR BODY

Title (de)

VERFAHREN ZUR EINSEITIGEN DOTIERUNG EINES HALBLEITERKÖRPERS

Title (fr)

PROCEDE PERMETTANT DE DOPER D'UN SEUL COTE UN DISPOSITIF A SEMI-CONDUCTEUR

Publication

EP 1068646 A1 (DE)

Application

EP 99914540 A

Priority

  • DE 19813188 A
  • EP 9902038 W

Abstract (en)

[origin: DE19813188A1] The invention relates to a method for doping one side of semiconductor bodies, especially of silicon wafers. To this end, a conventional oxide layer (2, 3) is firstly deposited on both the side (DS) of the substrate (1) to be doped and on the side (GS) of a substrate (1) which is not to be doped. Afterwards, a doping layer (4) containing the doping agent is deposited on the oxide layer (3) of the side (DS) which is to be doped. In a diffusion step, the doping agent firstly passes in a uniform manner through the oxide layer (3) located between the substrate (1) and the doped layer (4). The doping agent then penetrates the substrate (1), and produces a uniform doping.

IPC 1-7 (main, further and additional classification)

H01L 31/0288; H01L 21/225; H01L 31/18

IPC 8 full level (invention and additional information)

H01L 21/223 (2006.01); H01L 21/225 (2006.01); H01L 31/04 (2006.01); H01L 31/18 (2006.01)

CPC (invention and additional information)

H01L 31/1804 (2013.01); H01L 21/2256 (2013.01); Y02E 10/547 (2013.01); Y02P 70/521 (2015.11); Y10S 438/923 (2013.01)

Citation (search report)

See references of WO 9949521A1

Designated contracting state (EPC)

DE ES FR GB IT NL

EPO simple patent family

DE 19813188 A1 19991007; EP 1068646 A1 20010117; JP 2002508597 A 20020319; US 6448105 B1 20020910; WO 9949521 A1 19990930

INPADOC legal status


2004-04-21 [18D] DEEMED TO BE WITHDRAWN

- Effective date: 20031001

2002-12-04 [RAP1] TRANSFER OF RIGHTS OF AN EP PUBLISHED APPLICATION

- Owner name: SHELL SOLAR GMBH

2002-08-21 [RAP1] TRANSFER OF RIGHTS OF AN EP PUBLISHED APPLICATION

- Owner name: SIEMENS UND SHELL SOLAR GMBH

2001-01-17 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 20000821

2001-01-17 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A1

- Designated State(s): DE ES FR GB IT NL