Global patent index - EP 1069600 A1

EP 1069600 A1 2001-01-17 - ILLUMINATOR, EXPOSING METHOD AND APPARATUS, AND DEVICE MANUFACTURING METHOD

Title (en)

ILLUMINATOR, EXPOSING METHOD AND APPARATUS, AND DEVICE MANUFACTURING METHOD

Title (de)

BELICHTUNGSVORRICHTUNG UND -VERFAHREN, UND HERSTELLUNGSVERFAHREN EINER SOLCHEN VORRICHTUNG

Title (fr)

ILLUMINATEUR, PROCEDE ET APPAREIL D'EXPOSITION, PROCEDE DE FABRICATION DUDIT DISPOSITIF

Publication

EP 1069600 A1 (EN)

Application

EP 99909301 A

Priority

  • JP 9901442 W
  • JP 9385898 A
  • JP 18810098 A
  • JP 393299 A

Abstract (en)

An illumination apparatus for illuminating a surface to be illuminated with radiation comprises a radiation source (1) for generating a beam of radiation having a predetermined wavelength, a wavefront division type optical integrator (151) including a plurality of unit optical systems, a condenser optical system (9,11) for guiding the beams of radiation from the wavefront division type optical integrator to the surface to be illuminated, and a plurality of auxiliary optical members (OMA) for deflecting the beams of radiation through the unit optical systems. At least one of the auxiliary optical members is disposed corresponding to one of the unit optical systems. <IMAGE>

IPC 1-7 (main, further and additional classification)

H01L 21/027; G03F 7/20

IPC 8 full level (invention and additional information)

G03F 7/20 (2006.01)

CPC (invention and additional information)

G03F 7/70075 (2013.01); G03F 7/701 (2013.01); G03F 7/70108 (2013.01)

Designated contracting state (EPC)

AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

EPO simple patent family

US 2004104359 A1 20040603; EP 1069600 A1 20010117; EP 1069600 A4 20021120; JP 4329266 B2 20090909; WO 9949505 A1 19990930

INPADOC legal status

2006-10-18 [18R] REFUSED

- Ref Legal Event Code: 18R

- Effective date: 20060601

2003-04-02 [17Q] FIRST EXAMINATION REPORT

- Ref Legal Event Code: 17Q

- Effective date: 20030213

2002-11-20 [A4] SUPPLEMENTARY SEARCH REPORT

- Ref Legal Event Code: A4

- Effective date: 20021004

2002-11-20 [AK] DESIGNATED CONTRACTING STATES:

- Ref Legal Event Code: AK

- Designated State(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

2001-01-17 [17P] REQUEST FOR EXAMINATION FILED

- Ref Legal Event Code: 17P

- Effective date: 20001018

2001-01-17 [AK] DESIGNATED CONTRACTING STATES:

- Ref Legal Event Code: AK

- Designated State(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE