Global Patent Index - EP 1069972 A1

EP 1069972 A1 2001-01-24 - APPARATUS AND METHODS FOR SLURRY REMOVAL IN CHEMICAL MECHANICAL POLISHING

Title (en)

APPARATUS AND METHODS FOR SLURRY REMOVAL IN CHEMICAL MECHANICAL POLISHING

Title (de)

VERFAHREN UND VORRICHTUNG ZUM ENTFERNEN VON AUFSCHLÄMMUNG IM CHEMISCH-MECHANISCHEN POLIEREN

Title (fr)

DISPOSITIF ET PROCEDES SERVANT A ENLEVER UNE PATE DE POLISSAGE CHIMIOMECANIQUE

Publication

EP 1069972 A1 (EN)

Application

EP 99916363 A

Priority

  • US 9907418 W
  • US 5770498 A

Abstract (en)

[origin: WO9951398A1] A substrate and carrier head cleaning station (55b) is part of a chemical mechanical polishing apparatus. The cleaning station (55b) is positioned between two polishing stations to prevent slurry contamination therebetween. The cleaner may include a wash cup (100), a rotating scrub brush (112), and a nozzle (122) to direct a cleaning fluid (124) onto the substrate. Alternately, in a CMP apparatus having three polishing stations, the second station may be equipped with a soft polishing pad and be used as an intermediate cleaning station.

IPC 1-7 (main, further and additional classification)

B24B 37/04; B08B 1/04; B24B 55/00

IPC 8 full level (invention and additional information)

B08B 1/04 (2006.01); B24B 37/34 (2012.01); B24B 55/06 (2006.01); B24B 57/02 (2006.01); H01L 21/00 (2006.01); H01L 21/304 (2006.01); H01L 21/3105 (2006.01)

CPC (invention and additional information)

B24B 37/345 (2013.01); B24B 57/02 (2013.01); H01L 21/31053 (2013.01); H01L 21/67046 (2013.01); H01L 21/67051 (2013.01)

Citation (search report)

See references of WO 9951398A1

Designated contracting state (EPC)

AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

EPO simple patent family

WO 9951398 A1 19991014; EP 1069972 A1 20010124; JP 2002510875 A 20020409; TW 393378 B 20000611

INPADOC legal status


2003-01-29 [18D] DEEMED TO BE WITHDRAWN

- Ref Legal Event Code: 18D

- Effective date: 20020725

2002-02-27 [17Q] FIRST EXAMINATION REPORT

- Ref Legal Event Code: 17Q

- Effective date: 20020114

2001-01-24 [17P] REQUEST FOR EXAMINATION FILED

- Ref Legal Event Code: 17P

- Effective date: 20000824

2001-01-24 [AK] DESIGNATED CONTRACTING STATES:

- Ref Legal Event Code: AK

- Designated State(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE