EP 1070154 A1 20010124 - METHOD AND APPARATUS FOR DEPOSITION OF BIAXIALLY TEXTURED COATINGS
Title (en)
METHOD AND APPARATUS FOR DEPOSITION OF BIAXIALLY TEXTURED COATINGS
Title (de)
VERFAHREN UND VORRICHTUNG ZUM ABSCHEIDEN VON BIAXIAL TEXTURIERTEN BESCHICHTUNGEN
Title (fr)
PROCEDE ET APPAREIL POUR DEPOSER DES REVETEMENTS A TEXTURE BIAXIALE
Publication
Application
Priority
- EP 99915721 A 19990330
- EP 9902168 W 19990330
- EP 98201006 A 19980331
Abstract (en)
[origin: WO9950471A1] A deposition method and apparatus is described for manufacture of biaxially textured coatings where the biaxial texturing is induced by bombardment during deposition by energetic particles under a specifically controlled angle. The method for deposition of biaxially textured coatings onto a substrate (6) utilizes one or more magnetron sputtering devices (1) generating both a flux of material to be deposited and a flux (5) of energetic particles with a controllable direction and thereby controllable angle of incidence on the substrate (6). The magnetron sputter source (1) generates a beam (5) of energetic particles together with material to be deposited, said source being adapted so that said beam (5) is directed towards a substrate (6) under an angle controlled in such a way that a biaxially textured coating is deposited on the substrate (6).
IPC 1-7
IPC 8 full level
C23C 14/08 (2006.01); C23C 14/22 (2006.01); C23C 14/35 (2006.01); H01J 37/34 (2006.01); H05H 1/46 (2006.01)
CPC (source: EP KR)
C23C 14/083 (2013.01 - EP); C23C 14/225 (2013.01 - EP); C23C 14/35 (2013.01 - EP); C23C 14/354 (2013.01 - KR); C23C 14/46 (2013.01 - KR); H01J 37/3266 (2013.01 - EP); H01J 37/34 (2013.01 - EP); H01J 37/3405 (2013.01 - EP)
Citation (search report)
See references of WO 9950471A1
Designated contracting state (EPC)
AT BE CH DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
DOCDB simple family (publication)
WO 9950471 A1 19991007; AU 3418899 A 19991018; AU 746645 B2 20020502; AU 746645 C 20030220; CA 2326202 A1 19991007; CA 2326202 C 20080617; CN 1295628 A 20010516; EP 1070154 A1 20010124; JP 2002509988 A 20020402; KR 20010042128 A 20010525; RU 2224050 C2 20040220
DOCDB simple family (application)
EP 9902168 W 19990330; AU 3418899 A 19990330; CA 2326202 A 19990330; CN 99804648 A 19990330; EP 99915721 A 19990330; JP 2000541356 A 19990330; KR 20007010530 A 20000922; RU 2000127113 A 19990330