Global patent index - EP 1070154 A1

EP 1070154 A1 2001-01-24 - METHOD AND APPARATUS FOR DEPOSITION OF BIAXIALLY TEXTURED COATINGS

Title (en)

METHOD AND APPARATUS FOR DEPOSITION OF BIAXIALLY TEXTURED COATINGS

Title (de)

VERFAHREN UND VORRICHTUNG ZUM ABSCHEIDEN VON BIAXIAL TEXTURIERTEN BESCHICHTUNGEN

Title (fr)

PROCEDE ET APPAREIL POUR DEPOSER DES REVETEMENTS A TEXTURE BIAXIALE

Publication

EP 1070154 A1 (EN)

Application

EP 99915721 A

Priority

  • EP 99915721 A
  • EP 9902168 W
  • EP 98201006 A

Abstract (en)

[origin: WO9950471A1] A deposition method and apparatus is described for manufacture of biaxially textured coatings where the biaxial texturing is induced by bombardment during deposition by energetic particles under a specifically controlled angle. The method for deposition of biaxially textured coatings onto a substrate (6) utilizes one or more magnetron sputtering devices (1) generating both a flux of material to be deposited and a flux (5) of energetic particles with a controllable direction and thereby controllable angle of incidence on the substrate (6). The magnetron sputter source (1) generates a beam (5) of energetic particles together with material to be deposited, said source being adapted so that said beam (5) is directed towards a substrate (6) under an angle controlled in such a way that a biaxially textured coating is deposited on the substrate (6).

IPC 1-7 (main, further and additional classification)

C23C 14/35; H01J 37/34

IPC 8 full level (invention and additional information)

H05H 1/46 (2006.01); C23C 14/08 (2006.01); C23C 14/22 (2006.01); C23C 14/35 (2006.01); H01J 37/34 (2006.01)

CPC (invention and additional information)

C23C 14/225 (2013.01); C23C 14/083 (2013.01); C23C 14/35 (2013.01); H01J 37/3266 (2013.01); H01J 37/34 (2013.01); H01J 37/3405 (2013.01)

Citation (search report)

See references of WO 9950471A1

Designated contracting state (EPC)

AT BE CH DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

EPO simple patent family

WO 9950471 A1 19991007; AU 3418899 A 19991018; AU 746645 B2 20020502; AU 746645 C 20030220; CA 2326202 A1 19991007; CA 2326202 C 20080617; CN 1295628 A 20010516; EP 1070154 A1 20010124; JP 2002509988 A 20020402; RU 2224050 C2 20040220

INPADOC legal status

2010-03-31 [18D] DEEMED TO BE WITHDRAWN

- Ref Legal Event Code: 18D

- Effective date: 20091001

2002-09-04 [RAP1] TRANSFER OF RIGHTS OF AN EP PUBLISHED APPLICATION

- Owner name: N.V. BEKAERT S.A.

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2001-01-24 [17P] REQUEST FOR EXAMINATION FILED

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- Effective date: 20000926

2001-01-24 [AK] DESIGNATED CONTRACTING STATES:

- Ref Legal Event Code: AK

- Designated State(s): AT BE CH DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

2001-01-24 [AX] REQUEST FOR EXTENSION OF THE EUROPEAN PATENT TO

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- Free Format Text: LT PAYMENT 20000926