Global Patent Index - EP 1071123 A8

EP 1071123 A8 2001-05-02 - METHOD FOR FORMING FILM

Title (en)

METHOD FOR FORMING FILM

Title (de)

VERFAHREN ZUR HERSTELLUNG EINER SCHICHT

Title (fr)

PROCEDE DE FORMATION DE FILM

Publication

EP 1071123 A8 (EN)

Application

EP 99909290 A

Priority

  • JP 9901429 W
  • JP 12266198 A

Abstract (en)

[origin: EP1071123A1] In a film-forming process of depositing gaseous molecules each composed of plural atoms onto a substrate or reacting the gaseous molecules with the constituting elements of the substrate to form a compound film onto the substrate, the plasma, having the excited inert gaseous molecules having higher quasi-stable level energies than the ones requiring to dissociate the gaseous molecules into their atomicity elements and the gaseous molecules, is generated and then, the gaseous molecules are dissociated into their atomicity elements before the depositing into the substrate. As a result, the dissociation of the gaseous molecules onto the substrate is not required, leading to the lowering of the film-forming process. <IMAGE>

IPC 1-7 (main, further and additional classification)

H01L 21/316; H01L 21/318

IPC 8 full level (invention and additional information)

H01L 21/31 (2006.01); B01J 19/08 (2006.01); C23C 16/24 (2006.01); C23C 16/40 (2006.01); C23C 16/452 (2006.01); C23C 16/50 (2006.01); C23C 16/511 (2006.01); C23C 26/00 (2006.01); H01L 21/314 (2006.01); H01L 21/316 (2006.01); H01L 21/318 (2006.01)

CPC (invention and additional information)

C23C 16/402 (2013.01); C23C 16/401 (2013.01); C23C 16/409 (2013.01); C23C 16/452 (2013.01); H01L 21/02131 (2013.01); H01L 21/0214 (2013.01); H01L 21/02164 (2013.01); H01L 21/0217 (2013.01); H01L 21/02197 (2013.01); H01L 21/02238 (2013.01); H01L 21/02247 (2013.01); H01L 21/02249 (2013.01); H01L 21/02252 (2013.01); H01L 21/02274 (2013.01); H01L 21/3145 (2013.01); H01L 21/316 (2013.01); H01L 21/31612 (2013.01); H01L 21/3185 (2013.01)

Designated contracting state (EPC)

DE FR GB IT

EPO simple patent family

EP 1071123 A1 20010124; EP 1071123 A4 20041124; EP 1071123 A8 20010502; EP 1071123 B1 20070103; AU 2854699 A 19991018; AU 748409 B2 20020606; CA 2326052 A1 19991007; CN 1146025 C 20040414; CN 1299517 A 20010613; DE 69934680 D1 20070215; JP H11279773 A 19991012; KR 100441836 B1 20040727; US 2003003243 A1 20030102; US 6746726 B2 20040608; WO 9950899 A1 19991007

INPADOC legal status


2008-11-28 [PG25 FR] LAPSED IN A CONTRACTING STATE ANNOUNCED VIA POSTGRANT INFORM. FROM NAT. OFFICE TO EPO

- Ref Country Code: FR

- Free text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

- Effective date: 20070103

2008-04-30 [PG25 GB] LAPSED IN A CONTRACTING STATE ANNOUNCED VIA POSTGRANT INFORM. FROM NAT. OFFICE TO EPO

- Ref Country Code: GB

- Free text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

- Effective date: 20070403

2008-04-30 [PG25 FR] LAPSED IN A CONTRACTING STATE ANNOUNCED VIA POSTGRANT INFORM. FROM NAT. OFFICE TO EPO

- Ref Country Code: FR

- Free text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

- Effective date: 20070824

2008-04-30 [PG25 IT] LAPSED IN A CONTRACTING STATE ANNOUNCED VIA POSTGRANT INFORM. FROM NAT. OFFICE TO EPO

- Ref Country Code: IT

- Free text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

- Effective date: 20070103

2008-01-31 [PG25 DE] LAPSED IN A CONTRACTING STATE ANNOUNCED VIA POSTGRANT INFORM. FROM NAT. OFFICE TO EPO

- Ref Country Code: DE

- Free text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

- Effective date: 20070404

2007-12-27 [GBPC] GB: EUROPEAN PATENT CEASED THROUGH NON-PAYMENT OF RENEWAL FEE

- Effective date: 20070403

2007-12-12 [26N] NO OPPOSITION FILED

- Effective date: 20071005

2007-08-24 [EN] FR: TRANSLATION NOT FILED

2007-02-15 [REF] CORRESPONDS TO:

- Document: DE 69934680 P 20070215

2007-01-03 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: B1

- Designated State(s): DE FR GB IT

2007-01-03 [REG GB FG4D] EUROPEAN PATENT GRANTED

2005-05-25 [17Q] FIRST EXAMINATION REPORT

- Effective date: 20050412

2004-11-24 [A4] SUPPLEMENTARY SEARCH REPORT

- Effective date: 20041008

2001-05-02 [RAP1] TRANSFER OF RIGHTS OF AN EP PUBLISHED APPLICATION

- Owner name: TOKYO UNIVERSITY OF AGRICULTURE & TECHNOLOGY

2001-05-02 [RIN1] INVENTOR (CORRECTION)

- Inventor name: UENO, TOMO

2001-01-24 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 20001005

2001-01-24 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A1

- Designated State(s): DE FR GB IT