Global Patent Index - EP 1074043 A1

EP 1074043 A1 2001-02-07 - PROCESS FOR ASHING ORGANIC MATERIALS FROM SUBSTRATES

Title (en)

PROCESS FOR ASHING ORGANIC MATERIALS FROM SUBSTRATES

Title (de)

VERFAHREN ZUR VERASCHUNG VON ORGANISCHEN MATERIALEN AUF SUBSTRATEN

Title (fr)

PROCEDE DE BRULAGE DE MATERIAUX ORGANIQUES PRESENTS A LA SURFACE DE SUBSTRATS

Publication

EP 1074043 A1 (EN)

Application

EP 99904261 A

Priority

  • US 9901560 W
  • US 1469598 A

Abstract (en)

[origin: WO9939382A1] Ashing of an organic film from a substrate is carried out by providing a plasma comprising a gas or gas mixture selected from the following groups: (a) sulfur trioxide alone; (2) sulfur trioxide plus one supplemental gas; and (3) sulfur trioxide plus at least two supplemental gases. Any of the following gases may be employed as the supplemental gas: water vapor, ozone, hydrogen, nitrogen, nitrogen oxides, or a halogenide such as tetrafluoromethane, chlorine, nitrogen trifluoride, hexafluoroethane, or methyltrifluoride.

IPC 1-7 (main, further and additional classification)

H01L 21/302; C09K 13/00

IPC 8 full level (invention and additional information)

G03F 7/42 (2006.01); H01L 21/302 (2006.01); H01L 21/3065 (2006.01); H01L 21/311 (2006.01); H05K 3/26 (2006.01)

CPC (invention and additional information)

H01L 21/31138 (2013.01); G03F 7/427 (2013.01); H05K 3/26 (2013.01)

Designated contracting state (EPC)

AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

EPO simple patent family

WO 9939382 A1 19990805; CA 2319018 A1 19990805; CA 2319018 C 20040824; CN 1154159 C 20040616; CN 1289452 A 20010328; EP 1074043 A1 20010207; EP 1074043 A4 20021106; IL 137513 A 20040512; IL 137513 D0 20010724; JP 2002502125 A 20020122; JP 3358808 B2 20021224; KR 100377711 B1 20030326; MY 134851 A 20071231; TW I239994 B 20050921

INPADOC legal status


2006-08-16 [18R] REFUSED

- Effective date: 20060413

2003-07-30 [17Q] FIRST EXAMINATION REPORT

- Effective date: 20030612

2002-11-06 [A4] SUPPLEMENTARY SEARCH REPORT

- Effective date: 20020924

2002-11-06 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A4

- Designated State(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

2001-02-07 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 20000808

2001-02-07 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A1

- Designated State(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE