EP 1075018 A4 20050316 - SURFACE TREATING AGENT FOR MICROMACHINING AND METHOD FOR SURFACE TREATMENT
Title (en)
SURFACE TREATING AGENT FOR MICROMACHINING AND METHOD FOR SURFACE TREATMENT
Title (de)
OBERFLÄCHENBEHANDLUNGSMITTEL FÜR MIKROBEARBEITUNG UND VERFAHREN ZUR BEHANDLUNG EINER OBERFLÄCHE
Title (fr)
AGENT DE TRAITEMENT DE SURFACE POUR MICRO-USINAGE ET PROCEDE DE TRAITEMENT DE SURFACE
Publication
Application
Priority
- JP 9900936 W 19990226
- JP 4801998 A 19980227
Abstract (en)
[origin: EP1075018A1] The present invention provides a micromachining surface treatment material for and a surface treatment method that suppress widening of the diameter of contact holes when removing a natural oxidation layer arising at bottom sections of the contact holes. The micromachining surface treatment material contains less than 0.1% hydrofluoric acid, and more than 40% by weight but less than or equal to 47% by weight of ammonium fluoride. Also, a surfactant is contained in an amount from 0.0001 to 0.1 % by weight.
IPC 1-7
IPC 8 full level
H01L 21/306 (2006.01); H01L 21/311 (2006.01); H01L 21/316 (2006.01); H01L 21/768 (2006.01)
CPC (source: EP KR US)
H01L 21/02063 (2013.01 - EP US); H01L 21/302 (2013.01 - KR); H01L 21/31111 (2013.01 - EP US); H01L 21/76814 (2013.01 - EP US); H01L 21/02129 (2013.01 - EP US); H01L 21/02164 (2013.01 - EP US); H01L 21/02238 (2013.01 - EP US); H01L 21/02271 (2013.01 - EP US); H01L 21/02274 (2013.01 - EP US)
Citation (search report)
- [PX] EP 0860867 A1 19980826 - STELLA CHEMIFA KK [JP]
- See references of WO 9944227A1
Designated contracting state (EPC)
DE FR GB IT
DOCDB simple family (publication)
EP 1075018 A1 20010207; EP 1075018 A4 20050316; EP 1075018 B1 20080806; DE 69939255 D1 20080918; KR 100566060 B1 20060330; KR 20010040961 A 20010515; TW 541356 B 20030711; US 2004209481 A1 20041021; US 6797194 B1 20040928; WO 9944227 A1 19990902
DOCDB simple family (application)
EP 99906518 A 19990226; DE 69939255 T 19990226; JP 9900936 W 19990226; KR 20007008898 A 20000814; TW 88102968 A 19990226; US 62239700 A 20001201; US 84470404 A 20040512