EP 1078166 B1 20030611 - FRICTION VACUUM PUMP WITH A STATOR AND A ROTOR
Title (en)
FRICTION VACUUM PUMP WITH A STATOR AND A ROTOR
Title (de)
REIBUNGSVAKUUMPUMPE MIT STATOR UND ROTOR
Title (fr)
POMPE A VIDE A FRICTION DOTEE D'UN STATOR ET D'UN ROTOR
Publication
Application
Priority
- DE 19821634 A 19980514
- EP 9805802 W 19980911
Abstract (en)
[origin: DE19821634A1] The connection openings (36,37) lie in one plane end parallel to the rotor axis (15). The pump stages (12-14) lie to one side of the connections with stages (13,14) of larger diameter than the preceding stages (12,13) in which case the angle of the opening (36,37) plane is adapted to the increasing diameter in the direction of axis (15). The two openings form part of the general housing (2) and the first two stages (12,13) are turbo-molecular with rotors and stator designed to give high compression ratio in stage (11) and high vacuum in stage (13). Both stages (12,13) are spaced (a) by one third of the motor diameter. The diameter of connection (37) joined to gas inlet (38) amounts to twice the pump stage spacing specified (a).
IPC 1-7
IPC 8 full level
F04D 17/16 (2006.01); F04D 19/04 (2006.01)
CPC (source: EP KR US)
F04D 17/168 (2013.01 - EP US); F04D 19/04 (2013.01 - KR); F04D 19/046 (2013.01 - EP US)
Designated contracting state (EPC)
DE FR GB IT
DOCDB simple family (publication)
DE 19821634 A1 19991118; AU 754944 B2 20021128; AU 9348198 A 19991206; CA 2332777 A1 19991125; CA 2332777 C 20071106; CN 1115488 C 20030723; CN 1292851 A 20010425; DE 59808723 D1 20030717; EP 1078166 A1 20010228; EP 1078166 B1 20030611; EP 1078166 B2 20070905; JP 2002515568 A 20020528; JP 4173637 B2 20081029; KR 20010025024 A 20010326; TW 370594 B 19990921; US 6435811 B1 20020820; WO 9960275 A1 19991125
DOCDB simple family (application)
DE 19821634 A 19980514; AU 9348198 A 19980911; CA 2332777 A 19980911; CN 98814028 A 19980911; DE 59808723 T 19980911; EP 9805802 W 19980911; EP 98946450 A 19980911; JP 2000549859 A 19980911; KR 20007012771 A 20001114; TW 87117262 A 19981019; US 70004600 A 20001108