Global Patent Index - EP 1078388 A1

EP 1078388 A1 2001-02-28 - METHOD AND INSTALLATION FOR CORRECTING INTEGRATED CIRCUIT FAULTS WITH AN ION BEAM

Title (en)

METHOD AND INSTALLATION FOR CORRECTING INTEGRATED CIRCUIT FAULTS WITH AN ION BEAM

Title (de)

VERFAHREN UND VORRICHTUNG ZUR FEHLERKORREKTUR INTEGRIERTER SCHALTKREISEN MITTELS IONENSTRAHLEN

Title (fr)

PROCEDE ET INSTALLATION DE CORRECTION DES DEFAUTS DE CIRCUITS INTEGRES PAR UN FAISCEAU D'IONS

Publication

EP 1078388 A1 (FR)

Application

EP 99918038 A

Priority

  • FR 9901102 W
  • FR 9805881 A

Abstract (en)

[origin: FR2778493A1] The system uses a positive ion beam to remove or deposit material in the correction of faults in the manufacture of integrated circuits. The correction of faults in integrated circuits (14) uses a focused beam of positive ions directed on to the surface (23) of the integrated circuit. The beam is directed with an incident energy greater than or equal to 20 keV, and may be used for etching or deposition without a mask. It is used in conjunction with a potential contrast imaging system using secondary electrons. Immediately above the surface of the integrated circuit a local electric field is created to oppose the accumulation of cationic species on the surface, without canceling the detection electric field of the secondary electrons. This local field is maintained during the application of the ion beam on to the integrated circuit surface.

IPC 1-7 (main, further and additional classification)

H01J 37/305; H01J 37/02; H01J 37/317; H01L 21/768

IPC 8 full level (invention and additional information)

H01J 37/02 (2006.01); H01J 37/305 (2006.01); H01J 37/317 (2006.01); H01L 21/768 (2006.01)

CPC (invention and additional information)

H01L 21/76892 (2013.01); H01J 37/026 (2013.01); H01J 37/3056 (2013.01); H01J 37/3178 (2013.01); H01J 2237/004 (2013.01)

Citation (search report)

See references of WO 9959184A1

Designated contracting state (EPC)

DE FR GB IT

EPO simple patent family

FR 2778493 A1 19991112; FR 2778493 B1 20011102; EP 1078388 A1 20010228; WO 9959184 A1 19991118

INPADOC legal status


2006-12-06 [18D] DEEMED TO BE WITHDRAWN

- Effective date: 20060610

2001-02-28 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 20000925

2001-02-28 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A1

- Designated State(s): DE FR GB IT