EP 1078394 A1 20010228 - WET PROCESSING METHODS FOR THE MANUFACTURE OF ELECTRONIC COMPONENTS
Title (en)
WET PROCESSING METHODS FOR THE MANUFACTURE OF ELECTRONIC COMPONENTS
Title (de)
VERFAHREN ZUR NASSBEHANDLUNG IN DER HERSTELLUNG VON ELEKTRONISCHEN ANWENDUNGEN
Title (fr)
PROCEDES DE TRAITEMENT HUMIDE POUR LA FABRICATION DE COMPOSANTS ELECTRONIQUES
Publication
Application
Priority
- US 9909722 W 19990504
- US 8409798 P 19980504
- US 30458798 A 19980504
IPC 1-7
IPC 8 full level
B08B 3/04 (2006.01); B08B 11/00 (2006.01); H01L 21/302 (2006.01); H01L 21/306 (2006.01)
Citation (search report)
See references of WO 9957754A1
Designated contracting state (EPC)
DE FR GB IT
DOCDB simple family (publication)
CN 1299516 A 20010613; EP 1078394 A1 20010228; JP 2002514828 A 20020521
DOCDB simple family (application)
CN 99805751 A 19990504; EP 99920316 A 19990504; JP 2000547648 A 19990504