Global Patent Index - EP 1078394 A1

EP 1078394 A1 2001-02-28 - WET PROCESSING METHODS FOR THE MANUFACTURE OF ELECTRONIC COMPONENTS

Title (en)

WET PROCESSING METHODS FOR THE MANUFACTURE OF ELECTRONIC COMPONENTS

Title (de)

VERFAHREN ZUR NASSBEHANDLUNG IN DER HERSTELLUNG VON ELEKTRONISCHEN ANWENDUNGEN

Title (fr)

PROCEDES DE TRAITEMENT HUMIDE POUR LA FABRICATION DE COMPOSANTS ELECTRONIQUES

Publication

EP 1078394 A1 (EN)

Application

EP 99920316 A

Priority

  • US 9909722 W
  • US 8409798 P
  • US 30458798 A

IPC 1-7 (main, further and additional classification)

H01L 21/302; B08B 3/04; B08B 11/00

IPC 8 full level (invention and additional information)

B08B 3/04 (2006.01); B08B 11/00 (2006.01); H01L 21/302 (2006.01); H01L 21/306 (2006.01)

Citation (search report)

See references of WO 9957754A1

Designated contracting state (EPC)

DE FR GB IT

EPO simple patent family

CN 1299516 A 20010613; EP 1078394 A1 20010228; JP 2002514828 A 20020521

INPADOC legal status


2001-08-22 [18W] WITHDRAWN

- Ref Legal Event Code: 18W

- Date of withdrawal: 20010614

2001-02-28 [17P] REQUEST FOR EXAMINATION FILED

- Ref Legal Event Code: 17P

- Effective date: 20001026

2001-02-28 [AK] DESIGNATED CONTRACTING STATES:

- Ref Legal Event Code: AK

- Designated State(s): DE FR GB IT