Global Patent Index - EP 1078394 A1

EP 1078394 A1 20010228 - WET PROCESSING METHODS FOR THE MANUFACTURE OF ELECTRONIC COMPONENTS

Title (en)

WET PROCESSING METHODS FOR THE MANUFACTURE OF ELECTRONIC COMPONENTS

Title (de)

VERFAHREN ZUR NASSBEHANDLUNG IN DER HERSTELLUNG VON ELEKTRONISCHEN ANWENDUNGEN

Title (fr)

PROCEDES DE TRAITEMENT HUMIDE POUR LA FABRICATION DE COMPOSANTS ELECTRONIQUES

Publication

EP 1078394 A1 (EN)

Application

EP 99920316 A

Priority

  • US 9909722 W
  • US 8409798 P
  • US 30458798 A

IPC 1-7

H01L 21/302; B08B 3/04; B08B 11/00

IPC 8 full level

B08B 3/04 (2006.01); B08B 11/00 (2006.01); H01L 21/302 (2006.01); H01L 21/306 (2006.01)

Citation (search report)

See references of WO 9957754A1

Designated contracting state (EPC)

DE FR GB IT

DOCDB simple family (publication)

CN 1299516 A 20010613; EP 1078394 A1 20010228; JP 2002514828 A 20020521

DOCDB simple family (application)

CN 99805751 A 19990504; EP 99920316 A 19990504; JP 2000547648 A 19990504