Global Patent Index - EP 1078397 A1

EP 1078397 A1 2001-02-28 - METHOD FOR METALLIZING AN ELECTRIC COMPONENT AND ELECTRIC COMPONENT

Title (en)

METHOD FOR METALLIZING AN ELECTRIC COMPONENT AND ELECTRIC COMPONENT

Title (de)

VERFAHREN ZUR KONTAKTIERUNG EINES ELEKTRISCHEN BAUELEMENTS UND ELEKTRISCHES BAUELEMENT

Title (fr)

PROCEDE POUR LA METALLISATION D'UN COMPOSANT ELECTRIQUE, ET COMPOSANT ELECTRIQUE AINSI OBTENU

Publication

EP 1078397 A1 (DE)

Application

EP 99947053 A

Priority

  • DE 9901059 W
  • DE 19816245 A

Abstract (en)

[origin: DE19816245A1] In the semiconductor substrate are formed contact bores filled with electrically conductive material, with the bores insulated from the substrate, but are conductively coupled to the component. On the rear side of the substrate are formed contacts in electric contact with the contact bores. The formation of contact bores comprises lithographic defining and plasma etching of the contact bores. Typically the contact bores are filled with tungsten or copper. In the contact bores is deposited an insulating SiO2 film and an adhesive layer for the conductive material.

IPC 1-7 (main, further and additional classification)

H01L 21/768; H01L 23/48

IPC 8 full level (invention and additional information)

H01L 23/48 (2006.01)

CPC (invention and additional information)

H01L 23/481 (2013.01); H01L 2924/0002 (2013.01)

Combination set (CPC)

H01L 2924/0002 + H01L 2924/00

Citation (search report)

See references of WO 9956315A1

Designated contracting state (EPC)

AT BE DE FR GB

EPO simple patent family

DE 19816245 A1 19991021; EP 1078397 A1 20010228; WO 9956315 A1 19991104

INPADOC legal status


2006-10-04 [18D] DEEMED TO BE WITHDRAWN

- Ref Legal Event Code: 18D

- Effective date: 20060419

2003-11-19 [RAP1] TRANSFER OF RIGHTS OF AN EP PUBLISHED APPLICATION

- Owner name: FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DERANGEWAND

- Ref Legal Event Code: RAP1

2001-02-28 [17P] REQUEST FOR EXAMINATION FILED

- Ref Legal Event Code: 17P

- Effective date: 20000930

2001-02-28 [AK] DESIGNATED CONTRACTING STATES:

- Ref Legal Event Code: AK

- Designated State(s): AT BE DE FR GB