EP 1078453 B1 20030416 - THIN-LAYERED PIEZO-RESONATOR
Title (en)
THIN-LAYERED PIEZO-RESONATOR
Title (de)
DÜNNFILM-PIEZORESONATOR
Title (fr)
RESONATEUR PIEZO A COUCHES MINCES
Publication
Application
Priority
- DE 9901393 W 19990507
- DE 19820755 A 19980508
Abstract (en)
[origin: WO9959244A2] Preferably, the resonator is provided with lithographically produced holes or similar structures in the top electrode layer. The average distance between said holes or structures is shorter than the wavelength provided in order to operate each component. Said structures are preferably distributed in both an even manner to enable uniform modification of layer mass for each surface and specific adjustment of the resonance frequency or frequencies, and in an uneven manner in order to avoid the effects of diffraction.
IPC 1-7
IPC 8 full level
H03H 3/04 (2006.01); H03H 9/00 (2006.01); H03H 9/02 (2006.01); H03H 9/17 (2006.01)
CPC (source: EP US)
H03H 3/04 (2013.01 - EP US); H03H 9/173 (2013.01 - EP US); H03H 2003/0428 (2013.01 - EP US)
Designated contracting state (EPC)
DE FI FR GB IT NL SE
DOCDB simple family (publication)
WO 9959244 A2 19991118; WO 9959244 A3 19991229; DE 59905083 D1 20030522; EP 1078453 A2 20010228; EP 1078453 B1 20030416; JP 2002515667 A 20020528; JP 4326151 B2 20090902; US 6657363 B1 20031202
DOCDB simple family (application)
DE 9901393 W 19990507; DE 59905083 T 19990507; EP 99932664 A 19990507; JP 2000548952 A 19990507; US 70827800 A 20001108