EP 1080393 A1 20010307 - METHOD FOR MEASURING THE POSITION OF STRUCTURES ON A SURFACE OF A MASK
Title (en)
METHOD FOR MEASURING THE POSITION OF STRUCTURES ON A SURFACE OF A MASK
Title (de)
VERFAHREN ZUR MESSUNG DER LAGE VON STRUKTUREN AUF EINER MASKENOBERFLÄCHE
Title (fr)
PROCEDE POUR LA MESURE DE LA POSITION DE STRUCTURES SUR LA SURFACE D'UN MASQUE
Publication
Application
Priority
- DE 9900566 W 19990303
- DE 19817714 A 19980421
Abstract (en)
[origin: US6226087B1] A method is provided for measuring structures on a mask surface in which the mask is supported on a measuring stage that is interferometrically measurably displaceable perpendicularly to an optical axis of an image-measuring system. A mask coordinate system associated with the mask is aligned using alignment marks relative to a measuring device coordinate system. With set positions of the structures in the mask coordinate system being specified in advance, the positions of at least two external edges of the mask in the mask coordinate system that are perpendicular to one another are measured in addition to the actual positions of the structures in the mask coordinate system.
IPC 1-7
IPC 8 full level
G01B 11/03 (2006.01); G03F 1/00 (2006.01); G03F 1/08 (2006.01); G03F 7/20 (2006.01); G03F 9/00 (2006.01); G06T 7/60 (2006.01)
CPC (source: EP KR US)
G03F 1/44 (2013.01 - KR); G03F 1/84 (2013.01 - KR); G03F 7/70716 (2013.01 - EP US); G03F 7/70775 (2013.01 - KR); G03F 9/7007 (2013.01 - EP US); G03F 9/7084 (2013.01 - KR); G03F 9/7088 (2013.01 - KR); G03F 9/7092 (2013.01 - KR); G06T 7/60 (2013.01 - EP US)
Citation (search report)
See references of WO 9954785A1
Designated contracting state (EPC)
DE FR GB
DOCDB simple family (publication)
US 6226087 B1 20010501; DE 19817714 A1 19991104; DE 19817714 B4 20061228; DE 19817714 C5 20110630; EP 1080393 A1 20010307; JP 2002512384 A 20020423; JP 3488428 B2 20040119; KR 20010042869 A 20010525; TW 385359 B 20000321; WO 9954785 A1 19991028
DOCDB simple family (application)
US 25354799 A 19990222; DE 19817714 A 19980421; DE 9900566 W 19990303; EP 99917765 A 19990303; JP 2000545071 A 19990303; KR 20007011643 A 20001020; TW 88104917 A 19990329