Global patent index - EP 1080394 A1

EP 1080394 A1 2001-03-07 - ELASTOMERIC MASK AND USE IN FABRICATION OF DEVICES, INLCUDING PIXELATED ELECTROLUMINESCENT DISPLAYS

Title (en)

ELASTOMERIC MASK AND USE IN FABRICATION OF DEVICES, INLCUDING PIXELATED ELECTROLUMINESCENT DISPLAYS

Title (de)

MASKE AUS ELASTOMERISCHEM MATERIAL, GEBRAUCH DER MASKE BEI DER HERSTELLUNG VON GERÄTEN, EINSCHLIESSLICH ELEKTROLUMINESZENTEN GERASTERTEN BILDSCHIRMEN

Title (fr)

MASQUE ELASTOMERE ET SON UTILISATION DANS LA FABRICATION DE DISPOSITIFS, DONT DES AFFICHEURS ELECTROLUMINESCENTS PIXELISES

Publication

EP 1080394 A1 (EN)

Application

EP 99918698 A

Priority

  • US 9908623 W
  • US 6374298 A

Abstract (en)

[origin: WO9954786A1] An elastomeric mask is provided that allows deposition of a variety of materials through mask openings. The mask seals effectively against substrate surfaces, allowing simple deposition from fluid phase, gas phase, and the like or removal of material using gaseous or liquid etchants. The mask then can be simply peeled from the surface of the substrate leaving the patterned material behind. Multi-layered mask techniques are described in which openings in an upper mask allow selected openings of a lower mask to remain unshielded, while other openings of the lower mask are shielded. A first deposition step, followed by re-orientation of the upper mask to expose a different set of lower mask openings, allows selective deposition of different materials in different openings of the lower mask. Pixelated organic electroluminescent devices are provided via the described technique.

IPC 1-7 (main, further and additional classification)

G03F 7/00; G03F 1/00; G03F 7/12; B41C 1/14

IPC 8 full level (invention and additional information)

B41C 1/14 (2006.01); B05D 1/32 (2006.01); G03F 1/00 (2012.01); G03F 7/00 (2006.01); G03F 7/12 (2006.01); H01L 27/32 (2006.01); H01L 51/50 (2006.01); H05B 33/10 (2006.01)

CPC (invention and additional information)

C23C 14/042 (2013.01); B82Y 10/00 (2013.01); B82Y 30/00 (2013.01); B82Y 40/00 (2013.01); G03F 1/00 (2013.01); G03F 7/0002 (2013.01); G03F 7/0007 (2013.01); G03F 7/12 (2013.01); H01L 27/32 (2013.01); H01L 51/0011 (2013.01); H01L 27/3211 (2013.01); H01L 51/56 (2013.01)

Designated contracting state (EPC)

AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

EPO simple patent family

WO 9954786 A1 19991028; WO 9954786 A9 20000203; CA 2329412 A1 19991028; CA 2329412 C 20100921; EP 1080394 A1 20010307; JP 2002512124 A 20020423

INPADOC legal status

2012-05-09 [18D] DEEMED TO BE WITHDRAWN

- Ref Legal Event Code: 18D

- Effective date: 20111101

2001-03-07 [17P] REQUEST FOR EXAMINATION FILED

- Ref Legal Event Code: 17P

- Effective date: 20001116

2001-03-07 [AK] DESIGNATED CONTRACTING STATES:

- Ref Legal Event Code: AK

- Designated State(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE