Global Patent Index - EP 1080486 A1

EP 1080486 A1 2001-03-07 - DEVICE FOR FIXING SUBSTRATES

Title (en)

DEVICE FOR FIXING SUBSTRATES

Title (de)

VORRICHTUNG ZUM FIXIEREN VON SUBSTRATEN

Title (fr)

DISPOSITIF POUR FIXER DES SUBSTRATS

Publication

EP 1080486 A1 (DE)

Application

EP 99917978 A

Priority

  • DE 19818478 A
  • EP 9902500 W

Abstract (en)

[origin: DE19818478A1] The invention relates to a device for fixing substrates, each of which have an inner cavity, with an element which can be introduced into said inner cavity. Said device also has an axially moveable inner member (30) and an outer member (20) which can be expanded by means of a relative movement of the members.

IPC 1-7 (main, further and additional classification)

H01L 21/00; C23C 14/50; G11B 7/26

IPC 8 full level (invention and additional information)

G11B 7/26 (2006.01); B65G 49/07 (2006.01); F16B 19/10 (2006.01); H01L 21/68 (2006.01); H01L 21/687 (2006.01); G11B 17/028 (2006.01); G11B 23/00 (2006.01)

CPC (invention and additional information)

H01L 21/68714 (2013.01); F16B 19/109 (2013.01); H01L 21/68707 (2013.01); G11B 7/26 (2013.01); G11B 17/0284 (2013.01); G11B 23/0035 (2013.01)

Citation (search report)

See references of WO 9956306A1

Designated contracting state (EPC)

AT BE CH DE DK ES FI FR GB GR IE IT LI LU NL SE

EPO simple patent family

DE 19818478 A1 19991104; AU 3606299 A 19991116; CA 2329118 A1 19991104; CN 1298552 A 20010606; EP 1080486 A1 20010307; IL 138880 D0 20011125; JP 2002513206 A 20020508; KR 100371014 B1 20030206; TW 541273 B 20030711; US 6612558 B1 20030902; WO 9956306 A1 19991104

INPADOC legal status


2004-04-28 [18W] WITHDRAWN

- Ref Legal Event Code: 18W

- Effective date: 20040219

2004-02-04 [RAP1] TRANSFER OF RIGHTS OF AN EP PUBLISHED APPLICATION

- Owner name: STEAG HAMATECH AG

- Ref Legal Event Code: RAP1

2001-03-07 [17P] REQUEST FOR EXAMINATION FILED

- Ref Legal Event Code: 17P

- Effective date: 20001027

2001-03-07 [AK] DESIGNATED CONTRACTING STATES:

- Ref Legal Event Code: AK

- Designated State(s): AT BE CH DE DK ES FI FR GB GR IE IT LI LU NL SE