Global Patent Index - EP 1080486 A1

EP 1080486 A1 20010307 - DEVICE FOR FIXING SUBSTRATES

Title (en)

DEVICE FOR FIXING SUBSTRATES

Title (de)

VORRICHTUNG ZUM FIXIEREN VON SUBSTRATEN

Title (fr)

DISPOSITIF POUR FIXER DES SUBSTRATS

Publication

EP 1080486 A1 20010307 (DE)

Application

EP 99917978 A 19990414

Priority

  • DE 19818478 A 19980424
  • EP 9902500 W 19990414

Abstract (en)

[origin: US6612558B1] An apparatus for fixing and centering substrates that are each provided with an inner hole is provided. The apparatus has a housing having an axis that extends perpendicular to the plane of a substrate placed on the apparatus. A fixation unit is guided in the housing and is introducible into the inner hole of a substrate. The fixation unit includes an outer element that is moveable along the axis of the housing and relative to the housing, and also includes an inner element that is moveable along the axis of the housing and relative to the housing and to the outer element, which, by way of a relative movement of the inner and outer elements, is expandable for engagement with the inner hole of a substrate.

IPC 1-7

H01L 21/00; G11B 7/26; C23C 14/50

IPC 8 full level

B65G 49/07 (2006.01); F16B 19/10 (2006.01); G11B 7/26 (2006.01); H01L 21/68 (2006.01); H01L 21/687 (2006.01); G11B 17/028 (2006.01); G11B 23/00 (2006.01)

CPC (source: EP KR US)

F16B 19/109 (2013.01 - EP US); H01L 21/68 (2013.01 - KR); H01L 21/68707 (2013.01 - EP US); H01L 21/68714 (2013.01 - EP US); G11B 7/26 (2013.01 - EP US); G11B 17/0284 (2013.01 - EP US); G11B 23/0035 (2013.01 - EP US)

Citation (search report)

See references of WO 9956306A1

Designated contracting state (EPC)

AT BE CH DE DK ES FI FR GB GR IE IT LI LU NL SE

DOCDB simple family (publication)

US 6612558 B1 20030902; AU 3606299 A 19991116; CA 2329118 A1 19991104; CN 1298552 A 20010606; DE 19818478 A1 19991104; EP 1080486 A1 20010307; IL 138880 A0 20011125; JP 2002513206 A 20020508; KR 100371014 B1 20030206; KR 20010042999 A 20010525; TW 541273 B 20030711; WO 9956306 A1 19991104

DOCDB simple family (application)

US 67414000 A 20001215; AU 3606299 A 19990414; CA 2329118 A 19990414; CN 99805310 A 19990414; DE 19818478 A 19980424; EP 9902500 W 19990414; EP 99917978 A 19990414; IL 13888099 A 19990414; JP 2000546386 A 19990414; KR 20007011842 A 20001024; TW 88105986 A 19990414