EP 1081106 A4 20080604 - SYNTHETIC QUARTZ GLASS OPTICAL MEMBER FOR ULTRAVIOLET LIGHT AND REDUCTION PROJECTION EXPOSURE SYSTEM USING THE SAME
Title (en)
SYNTHETIC QUARTZ GLASS OPTICAL MEMBER FOR ULTRAVIOLET LIGHT AND REDUCTION PROJECTION EXPOSURE SYSTEM USING THE SAME
Title (de)
OPTISCHES ELEMENT AUS SYNTHETISCHEM QUARZGLASS FÜR UV-LICHT UND EINRICHTUNG ZUR VERRINGERUNG DER BELICHTUNG, DAS DIESES BENUTZT
Title (fr)
ELEMENT OPTIQUE EN VERRE DE QUARTZ SYNTHETIQUE POUR LUMIERE ULTRAVIOLETTE ET SYSTEME D'EXPOSITION A REDUCTION PROJECTION L'UTILISANT
Publication
Application
Priority
- JP 0000873 W 20000216
- JP 3767099 A 19990216
Abstract (en)
[origin: EP1081106A1] This invention provides a synthetic silica glass optical member used together with light having a specific wavelength of 250 nm or less, in which the difference between the maximum value and the minimum value of transmittance %/cm per cm in thickness for the light in a predetermined direction within a plane perpendicular to the optical axis is 2.0%/cm or less. <IMAGE>
IPC 1-7
IPC 8 full level
C03C 3/06 (2006.01); C03C 13/04 (2006.01); G03F 7/20 (2006.01)
CPC (source: EP KR US)
C03C 3/06 (2013.01 - EP US); C03C 13/045 (2013.01 - EP US); G02B 1/02 (2013.01 - EP US); G03F 7/7015 (2013.01 - KR); G03F 7/70191 (2013.01 - KR); G03F 7/70266 (2013.01 - KR); G03F 7/70575 (2013.01 - KR); G03F 7/70958 (2013.01 - EP KR US); Y10S 65/90 (2013.01 - EP US); Y10S 359/90 (2013.01 - EP US); Y10S 501/90 (2013.01 - EP US)
Citation (search report)
- [Y] EP 0401845 A2 19901212 - HERAEUS QUARZGLAS [DE], et al
- [Y] EP 0720970 A1 19960710 - NIPPON KOGAKU KK [JP]
- [Y] EP 0483752 A2 19920506 - SHINETSU QUARTZ PROD [JP], et al
- [Y] EP 0835848 A2 19980415 - NIPPON KOGAKU KK [JP]
- [Y] US 5194893 A 19930316 - NISHI KENJI [JP]
- [Y] EP 0870737 A1 19981014 - SHINETSU QUARTZ PROD [JP], et al
- [Y] CHEMICAL ABSTRACTS + INDEXES, AMERICAN CHEMICAL SOCIETY. COLUMBUS, US, vol. 6, no. 113, 6 August 1990 (1990-08-06), XP000188429, ISSN: 0009-2258
- [Y] DATABASE WPI Week 199304, Derwent World Patents Index; AN 1993-036293, XP002478015
Designated contracting state (EPC)
DE FR GB NL
DOCDB simple family (publication)
EP 1081106 A1 20010307; EP 1081106 A4 20080604; AU 2572000 A 20000904; KR 100516338 B1 20050922; KR 20010042697 A 20010525; TW 581747 B 20040401; US 6587262 B1 20030701; WO 0048953 A1 20000824
DOCDB simple family (application)
EP 00903985 A 20000216; AU 2572000 A 20000216; JP 0000873 W 20000216; KR 20007011410 A 20001013; TW 89102475 A 20000215; US 68690700 A 20001012